Inventor · disambiguated record

Chong Hwan Chu

Also filed as: CHU CHONG HWAN

2 granted patents·21 citations·filing 2001–2009

58Inventor score

Technology areasH10P

Files withTOKYO ELECTRON LTD1

Top patents by PatentIndex Score

2 records

0187US7637269B1Low damage method for ashing a substrate using CO2/CO-based processTOKYO ELECTRON LTD·Filed 2009·Granted Dec 29, 2009·17 cites·19 claims
0247US6783626B2Treatment and evaluation of a substrate processing chamberFiled 2001·Granted Aug 31, 2004·4 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →