Inventor · disambiguated record
Chia-Hung Chung
Also filed as: CHUNG CHIA-HUNG
11 granted patents·57 citations·filing 2002–2022
86Inventor score
Top patents by PatentIndex Score
11 records- 0178US6938505B2Chamber wafer detectionTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Sep 6, 2005·29 cites·4 claims
- 0270US11004709B2Method for monitoring gas in wafer processing systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 11, 2021·1 cites·20 claims
- 0370US10943802B2Photoresist bottle containerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 9, 2021·1 cites·20 claims
- 0468US11454891B2Manufacturing method of semiconductor device and semiconductor processing systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 27, 2022·0 cites·20 claims
- 0566US11899368B2Manufacturing method of semiconductor device and semiconductor processing systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 13, 2024·0 cites·20 claims
- 0664US8748885B2Soft material wafer bonding and method of bondingYEH TUNG-TI·Filed 2012·Granted Jun 10, 2014·2 cites·20 claims
- 0762US7254513B2Fault detection and classification (FDC) specification management apparatus and method thereofTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Aug 7, 2007·11 cites·18 claims
- 0861US6775918B2Wafer cassette pod equipped with position sensing deviceTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 17, 2004·11 cites·10 claims
- 0954US11061333B2Manufacturing method of semiconductor device and semiconductor processing systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 13, 2021·0 cites·20 claims
- 1039US6755602B2Wafer transport pod with linear door opening mechanismTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Jun 29, 2004·2 cites·6 claims
- 1135US8592297B2Wafer and method of processing waferYEH TUNG-TI·Filed 2011·Granted Nov 26, 2013·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →