Inventor · disambiguated record
Chungwei Hsu
Also filed as: HSU CHUNGWEI
4 granted patents·47 citations·filing 1999–2007
73Inventor score
Top patents by PatentIndex Score
4 records- 0167US6083807AOverlay measuring mark and its methodNANYA TECHNOLOGY CORP·Filed 1999·Granted Jul 4, 2000·40 cites·10 claims
- 0261US7667216B2Method of achieving CD linearity control for full-chip CPL manufacturingASML MASKTOOLS BV·Filed 2007·Granted Feb 23, 2010·1 cites·11 claims
- 0348US6215546B1Method of optical correction for improving the pattern shrinkage caused by scattering of the lightNANYA TECHNOLOGY CORP·Filed 2000·Granted Apr 10, 2001·4 cites·6 claims
- 0446US7211815B2Method of achieving CD linearity control for full-chip CPL manufacturingASML MASKTOOLS BV·Filed 2003·Granted May 1, 2007·2 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →