Inventor · disambiguated record
Christoph Husemann
Also filed as: HUSEMANN CHRISTOPH
23 granted patents·4 pending applications·42 citations·filing 2015–2024
92Inventor score
Files withZEISS CARL MICROSCOPY GMBH13ZEISS CARL SMT GMBH13ZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH1
Top patents by PatentIndex Score
27 records- 0193US10068325B2Method for three-dimensionally measuring a 3D aerial image of a lithography maskZEISS CARL SMT GMBH·Filed 2017·Granted Sep 4, 2018·10 cites·20 claims
- 0292US10108085B2Method for localizing defects on substratesZEISS CARL SMT GMBH·Filed 2017·Granted Oct 23, 2018·13 cites·20 claims
- 0386US11892769B2Method for detecting an object structure and apparatus for carrying out the methodZEISS CARL SMT GMBH·Filed 2020·Granted Feb 6, 2024·2 cites·23 claims
- 0486US11774859B2Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography processZEISS CARL SMT GMBH·Filed 2020·Granted Oct 3, 2023·2 cites·20 claims
- 0586US10670387B2Determining the position of an object in the beam path of an optical deviceZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jun 2, 2020·3 cites·8 claims
- 0680US11079338B2Method for detecting a structure of a lithography mask and device for carrying out the methodZEISS CARL SMT GMBH·Filed 2019·Granted Aug 3, 2021·2 cites·30 claims
- 0779US2024264536A1Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation modelZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0877US12001145B2Apparatus and method for analyzing an element of a photolithography process with the aid of a transformation modelZEISS CARL SMT GMBH·Filed 2019·Granted Jun 4, 2024·1 cites·22 claims
- 0975US12111579B2Method and apparatus for evaluating an unknown effect of defects of an element of a photolithography processZEISS CARL SMT GMBH·Filed 2023·Granted Oct 8, 2024·0 cites·26 claims
- 1074US11054305B2Method and device for beam analysisZEISS CARL SMT GMBH·Filed 2019·Granted Jul 6, 2021·1 cites·22 claims
- 1172US10634886B2Method for three-dimensionally measuring a 3D aerial image of a lithography maskZEISS CARL SMT GMBH·Filed 2018·Granted Apr 28, 2020·1 cites·6 claims
- 1272US10330913B2Method and device for imaging an objectZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jun 25, 2019·2 cites·12 claims
- 1371US10620417B2Method for generating a reflection-reduced contrast image and corresponding deviceZEISS CARL MICROSCOPY GMBH·Filed 2016·Granted Apr 14, 2020·2 cites·14 claims
- 1470US10788748B2Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried outZEISS CARL SMT GMBH·Filed 2018·Granted Sep 29, 2020·1 cites·26 claims
- 1569US10605654B2Method and device for beam analysisZEISS CARL SMT GMBH·Filed 2018·Granted Mar 31, 2020·1 cites·17 claims
- 1664US10191292B2Apparatus and method for light modulationZEISS CARL MICROSCOPY GMBH·Filed 2016·Granted Jan 29, 2019·1 cites·18 claims
- 1758US2020082557A1Device and method for producing a three-dimensional image of an objectZEISS CARL MICROSCOPY GMBH·Filed 2019·Application pending·0 cites
- 1857US2024133805A1Method for determining the phase and/or refractive index of a region of an object, and microscope for determining the phase and/or refractive index of a region of an objectZEISS CARL MICROSCOPY GMBH·Filed 2023·Application pending·0 cites
- 1956US12335614B2Method and device for determining the optimal position of the focal plane for examining a specimen by microscopyZEISS CARL MICROSCOPY GMBH·Filed 2022·Granted Jun 17, 2025·0 cites·9 claims
- 2051US12307334B2Method and device for evaluating a statistically distributed measured value in the examination of an element of a photolithography processZEISS CARL SMT GMBH·Filed 2021·Granted May 20, 2025·0 cites·25 claims
- 2148US2017301101A1Device and method for producing a three-dimensional image of an objectZEISS CARL MICROSCOPY GMBH·Filed 2015·Application pending·0 cites
- 2245US10475168B2Method for generating a result image and optical deviceZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Nov 12, 2019·0 cites·20 claims
- 2344US12345864B2Apparatus and method for manipulating a focus of excitation light on or in a sample and microscopeZEISS CARL MICROSCOPY GMBH·Filed 2019·Granted Jul 1, 2025·0 cites·26 claims
- 2443US10175468B2Method for generating a contrast image of an object structure and apparatuses relating theretoZEISS CARL MICROSCOPY GMBH·Filed 2016·Granted Jan 8, 2019·0 cites·11 claims
- 2543US10151576B2Confocally chromatic sensor for determining coordinates of a measurement objectZEISS CARL INDUSTRIELLE MESSTECHNIK GMBH·Filed 2017·Granted Dec 11, 2018·0 cites·15 claims
- 2642US10338368B2Phase contrast imagingZEISS CARL MICROSCOPY GMBH·Filed 2015·Granted Jul 2, 2019·0 cites·13 claims
- 2739US11442263B2Method and devices for displaying stereoscopic imagesZEISS CARL MICROSCOPY GMBH·Filed 2017·Granted Sep 13, 2022·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →