Inventor · disambiguated record
Chidam Kallingal
Also filed as: KALLINGAL CHIDAM
6 granted patents·9 citations·filing 2004–2015
74Inventor score
Top patents by PatentIndex Score
6 records- 0181US8612904B1Use of polarization and composite illumination source for advanced optical lithographyGLOBALFOUNDRIES INC·Filed 2012·Granted Dec 17, 2013·5 cites·25 claims
- 0263US9443055B2Methods for retargeting circuit design layouts and for fabricating semiconductor devices using retargeted layoutsGLOBALFOUNDRIES INC·Filed 2015·Granted Sep 13, 2016·1 cites·14 claims
- 0361US8910094B2Retargeting semiconductor device shapes for multiple patterning processesGLOBALFOUNDRIES INC·Filed 2013·Granted Dec 9, 2014·1 cites·10 claims
- 0459US7776494B2Lithographic mask and methods for fabricating a semiconductor deviceGLOBAL FOUNDRIES INC·Filed 2006·Granted Aug 17, 2010·1 cites·20 claims
- 0553US9064086B2Retargeting semiconductor device shapes for multiple patterning processesGLOBALFOUNDRIES INC·Filed 2014·Granted Jun 23, 2015·0 cites·8 claims
- 0645US7071124B1Method to reduce PEB sensitivity of resistCYPRESS SEMICONDUCTOR CORP·Filed 2004·Granted Jul 4, 2006·1 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →