Inventor · disambiguated record
Chien-Hsin Lai
Also filed as: LAI CHIEN-HSIN
29 granted patents·2 pending applications·360 citations·filing 1998–2008
97Inventor score
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31 records- 0191US6120366AChemical-mechanical polishing padUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 19, 2000·99 cites·10 claims
- 0284US6220930B1Wafer polishing headUNITED MICROELECTRONICS CORP·Filed 2000·Granted Apr 24, 2001·23 cites·9 claims
- 0377US7569111B2Method of cleaning deposition chamberUNITED MICROELECTRONICS CORP·Filed 2006·Granted Aug 4, 2009·2 cites·14 claims
- 0475US6293850B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 25, 2001·28 cites·13 claims
- 0575US6183350B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Feb 6, 2001·28 cites·10 claims
- 0672US6341995B1Chemical mechanical polishing apparatusUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jan 29, 2002·15 cites·13 claims
- 0771US6721628B1Closed loop concentration control system for chemical mechanical polishing slurryUNITED MICROELECTRONICS CORP·Filed 2000·Granted Apr 13, 2004·16 cites·18 claims
- 0868US7264676B2Plasma apparatus and method capable of adaptive impedance matchingUNITED MICROELECTRONICS CORP·Filed 2003·Granted Sep 4, 2007·21 cites·13 claims
- 0964US6569771B2Carrier head for chemical mechanical polishingUNITED MICROELECTRONICS CORP·Filed 2002·Granted May 27, 2003·10 cites·13 claims
- 1063US6682399B1Pressure monitoring system for chemical-mechanical polishingUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jan 27, 2004·10 cites·16 claims
- 1161US6416615B1Device for detecting abnormality in chemical-mechanical polishing operationUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jul 9, 2002·8 cites·9 claims
- 1258US6648729B2Wafer pressure regulation system for polishing machineUNITED MICROELECTRONICS CORP·Filed 2002·Granted Nov 18, 2003·8 cites·9 claims
- 1356US6352244B2Auxiliary gasline-heating unit in chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 2001·Granted Mar 5, 2002·2 cites·2 claims
- 1456US6322057B1Auxiliary gasline-heating unit in chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 2000·Granted Nov 27, 2001·2 cites·1 claims
- 1553US6036356AIn-situ slurry mixing apparatusUNITED MICROELECTRONICS CORP·Filed 1998·Granted Mar 14, 2000·17 cites·18 claims
- 1651US6129043AGas tube with heating apparatusUNITED MICROELECTRONICS CORP·Filed 1999·Granted Oct 10, 2000·14 cites·13 claims
- 1745US6676801B2Pressure suppression device for chemical mechanical polishing machine and method thereofUNITED MICROELECTRONICS CORP·Filed 2001·Granted Jan 13, 2004·1 cites·16 claims
- 1843US6062963ARetainer ring design for polishing head of chemical-mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted May 16, 2000·10 cites·10 claims
- 1942US6241582B1Chemical mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1998·Granted Jun 5, 2001·6 cites·20 claims
- 2041US8105648B2Method for operating a chemical deposition chamberLAI CHIEN-HSIN·Filed 2008·Granted Jan 31, 2012·0 cites·13 claims
- 2141US6206758B1Method for increasing working life of retaining ring in chemical-mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted Mar 27, 2001·9 cites·11 claims
- 2240US6119294ACleaning system with automatically controlled brush pressureUNITED MICROELECTRONICS CORP·Filed 1999·Granted Sep 19, 2000·8 cites·24 claims
- 2339US2006118041A1Guard ringLAI CHIEN-HSIN·Filed 2004·Application pending·0 cites
- 2438US2001000770A1Wafer polishing headUNITED MICROELECTRONICS CORP·Filed 2000·Application pending·0 cites
- 2537US6096162AChemical mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 1998·Granted Aug 1, 2000·7 cites·9 claims
- 2636US6228420B1Method to maintain consistent thickness of thin film deposited by chemical vapor depositionUNITED MICROELECTRONICS CORP·Filed 1999·Granted May 8, 2001·6 cites·5 claims
- 2735US6267654B1Pad backer for polishing head of chemical mechanical polishing machineUNITED MICROELECTRONICS CORP·Filed 2000·Granted Jul 31, 2001·0 cites·5 claims
- 2835US6051139ADevice for filtering slurryUNITED MICROELECTRONICS CORP·Filed 1998·Granted Apr 18, 2000·6 cites·5 claims
- 2930US6234876B1Chemical-mechanical polish machines and fabrication process using the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted May 22, 2001·0 cites·8 claims
- 3029US6307163B1Chemical mixer tank calibrator and calibrating method for the sameUNITED MICROELECTRONICS CORP·Filed 1999·Granted Oct 23, 2001·2 cites·7 claims
- 3129US6165255AChemical-liquid controlling apparatusUNITED MICROELECTRONICS CORP·Filed 1999·Granted Dec 26, 2000·2 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →