Inventor · disambiguated record
Chan-Yun Lee
Also filed as: LEE CHAN YUN
3 granted patents·1 pending application·33 citations·filing 2000–2019
66Inventor score
Top patents by PatentIndex Score
4 records- 0177US10431469B2Method for high aspect ratio photoresist removal in pure reducing plasmaMATTSON TECH INC·Filed 2013·Granted Oct 1, 2019·5 cites·9 claims
- 0273US6667244B1Method for etching sidewall polymer and other residues from the surface of semiconductor devicesFiled 2000·Granted Dec 23, 2003·28 cites·2 claims
- 0352US11107693B2Method for high aspect ratio photoresist removal in pure reducing plasmaBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2019·Granted Aug 31, 2021·0 cites·12 claims
- 0450US2010065215A1Plasma generating apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →