Inventor · disambiguated record
Chiwoei Wayne Lo
Also filed as: LO CHIWOEI WAYNE
14 granted patents·2,019 citations·filing 1997–2005
96Inventor score
Top patents by PatentIndex Score
14 records- 0197US7253645B2Detection of defects in patterned substratesAPPLIED MATERIALS INC·Filed 2005·Granted Aug 7, 2007·76 cites·2 claims
- 0297US6509750B1Apparatus for detecting defects in patterned substratesAPPLIED MATERIALS INC·Filed 2001·Granted Jan 21, 2003·118 cites·21 claims
- 0397US6252412B1Method of detecting defects in patterned substratesSCHLUMBERGER TECHNOLOGIES INC·Filed 1999·Granted Jun 26, 2001·344 cites·19 claims
- 0496US6539106B1Feature-based defect detectionAPPLIED MATERIALS INC·Filed 1999·Granted Mar 25, 2003·434 cites·25 claims
- 0596US6232787B1Microstructure defect detectionSCHLUMBERGER TECHNOLOGIES INC·Filed 1999·Granted May 15, 2001·249 cites·42 claims
- 0695US6344750B1Voltage contrast method for semiconductor inspection using low voltage particle beamSCHLUMBERGER TECHNOLOGIES INC·Filed 1999·Granted Feb 5, 2002·217 cites·18 claims
- 0795US6091249AMethod and apparatus for detecting defects in wafersSCHLUMBERGER TECHNOLOGIES INC·Filed 1998·Granted Jul 18, 2000·236 cites·42 claims
- 0893US6566897B2Voltage contrast method and apparatus for semiconductor inspection using low voltage particle beamAPPLIED MATERIALS INC·Filed 2001·Granted May 20, 2003·79 cites·32 claims
- 0991US6504393B1Methods and apparatus for testing semiconductor and integrated circuit structuresAPPLIED MATERIALS INC·Filed 1997·Granted Jan 7, 2003·130 cites·35 claims
- 1090US7067809B2Method and apparatus for multiple charged particle beamsAPPLIED MATERIALS INC·Filed 2004·Granted Jun 27, 2006·29 cites·24 claims
- 1182US7262418B2Method and apparatus for multiple charged particle beamsAPPLIED MATERIALS INC·Filed 2004·Granted Aug 28, 2007·14 cites·5 claims
- 1280US6914441B2Detection of defects in patterned substratesAPPLIED MATERIALS INC·Filed 2002·Granted Jul 5, 2005·17 cites·18 claims
- 1380US6252705B1Stage for charged particle microscopy systemSCHLUMBERGER TECHNOLOGIES INC·Filed 1999·Granted Jun 26, 2001·65 cites·46 claims
- 1456US5920073AOptical systemSCHLUMBERGER TECHNOLOGIES INC·Filed 1997·Granted Jul 6, 1999·11 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →