Inventor · disambiguated record
Chien-Hsing Lu
Also filed as: LU CHIEN-HSING
5 granted patents·4 pending applications·3 citations·filing 2008–2024
67Inventor score
Top patents by PatentIndex Score
9 records- 0179US12487531B2Extreme ultraviolet (EUV) radiation source apparatus, EUV lithography system, and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 2, 2025·0 cites·20 claims
- 0262US2024369939A1Extreme ultraviolet (euv) radiation source apparatus, euv lithography system, and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0356US9656278B2Jet spray nozzle and method for cleaning photo masks and semiconductor wafersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 23, 2017·0 cites·18 claims
- 0455US8999610B2Lithography mask repairing processTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Apr 7, 2015·0 cites·21 claims
- 0552US2024422888A1Extreme ultraviolet light source with thermal stabilizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0648US2024004318A1Euv source stabilization apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0746US2015146186A1Lithography Mask Repairing ProcessTAIWAN SEMICONDUCTOR MFG·Filed 2015·Application pending·0 cites
- 0844US8758523B2Method for cleaning photo masks and semiconductor wafers using a jetspray nozzleHSIEH KUN-LONG·Filed 2011·Granted Jun 24, 2014·0 cites·17 claims
- 0943US8056832B2Jetspray nozzle and method for cleaning photo masks and semiconductor wafersHSIEH KUN-LONG·Filed 2008·Granted Nov 15, 2011·3 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →