Inventor · disambiguated record
Chi-Ta Lu
Also filed as: LU CHI-TA
19 granted patents·5 pending applications·27 citations·filing 2010–2025
91Inventor score
Top patents by PatentIndex Score
24 records- 0192US11429019B2Method for manufacturing semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 30, 2022·2 cites·20 claims
- 0290US10877380B1Using inverse lithography technology in a method of mask data preparation for generating integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·14 cites·20 claims
- 0387US10866508B2Method for manufacturing photomask and semiconductor manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 15, 2020·2 cites·20 claims
- 0486US2024385507A1Mask defect preventionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0584US12124163B2Mask defect preventionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 22, 2024·0 cites·20 claims
- 0684US11900040B2Method and system for reducing layout distortion due to exposure non-uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 13, 2024·1 cites·20 claims
- 0784US11402743B2Mask defect preventionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 2, 2022·1 cites·20 claims
- 0882US2025233071A1Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0981US2024386176A1Critical dimension uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1080US12254258B2Critical dimension uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 18, 2025·0 cites·20 claims
- 1180US11860530B2Mask defect preventionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 2, 2024·0 cites·20 claims
- 1280US11308254B2Method and system for reducing layout distortion due to exposure non-uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 19, 2022·1 cites·20 claims
- 1379US12293969B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted May 6, 2025·0 cites·20 claims
- 1477US11763057B2Critical dimension uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 19, 2023·0 cites·19 claims
- 1577US8458631B2Cycle time reduction in data preparationLU CHI-TA·Filed 2011·Granted Jun 4, 2013·3 cites·20 claims
- 1675US10784196B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 22, 2020·1 cites·20 claims
- 1773US12174529B2Method for manufacturing semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 24, 2024·0 cites·20 claims
- 1873US11209728B2Mask and method for fabricating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 28, 2021·1 cites·20 claims
- 1972US2024143887A1Method and system for reducing layout distortion due to exposure non-uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2071US11476193B2Semiconductor structure and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 18, 2022·0 cites·20 claims
- 2165US2022113621A1Mask and method for fabricating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Application pending·0 cites
- 2264US11055464B2Critical dimension uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 6, 2021·0 cites·20 claims
- 2363US8650511B2Lithography performance check methods and apparatusLU CHI-TA·Filed 2010·Granted Feb 11, 2014·1 cites·20 claims
- 2438US9136092B2Structure and method for E-beam writingLU CHI-TA·Filed 2012·Granted Sep 15, 2015·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →