Inventor · disambiguated record
Chih-Shun Lu
Also filed as: LU CHIH-SHUN
4 granted patents·107 citations·filing 1976–2018
74Inventor score
Top patents by PatentIndex Score
4 records- 0181US5880823AMethod and apparatus for measuring atomic vapor density in deposition systemsFiled 1994·Granted Mar 9, 1999·78 cites·16 claims
- 0277US4036167AApparatus for monitoring vacuum deposition processesLEYBOLD HERAEUS INFICON·Filed 1976·Granted Jul 19, 1977·28 cites·7 claims
- 0361US7719681B2Apparatus and method for measuring vapor flux densityINFICON·Filed 2007·Granted May 18, 2010·1 cites·16 claims
- 0444US11551905B2Resonant process monitorAPPLIED MATERIALS INC·Filed 2018·Granted Jan 10, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →