Inventor · disambiguated record

Chi-Fei Nien

Also filed as: NIEN CHI-FEI

1 granted patent·1 pending application·2 citations·filing 2018–2022

20Inventor score

Technology areasG03F

Files withASML NETHERLANDS BV2

Top patents by PatentIndex Score

2 records

0181US11448973B2Computational metrology based correction and controlASML NETHERLANDS BV·Filed 2018·Granted Sep 20, 2022·2 cites·21 claims
0269US2022365446A1Computational metrology based correction and controlASML NETHERLANDS BV·Filed 2022·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →