Inventor · disambiguated record
Christopher Pena
Also filed as: PENA CHRISTOPHER · PENA CHRISTOPHER J
15 granted patents·2 pending applications·138 citations·filing 2000–2022
92Inventor score
Top patents by PatentIndex Score
17 records- 0194US9502275B1Service tunnel for use on capital equipment in semiconductor manufacturing and research fabsLAM RES CORP·Filed 2015·Granted Nov 22, 2016·13 cites·17 claims
- 0294US6261959B1Method and apparatus for chemically-mechanically polishing semiconductor wafersLAM RES CORP·Filed 2000·Granted Jul 17, 2001·58 cites·27 claims
- 0392US11393705B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2020·Granted Jul 19, 2022·2 cites·16 claims
- 0491US10557197B2Monolithic gas distribution manifold and various construction techniques and use cases thereforLAM RES CORP·Filed 2015·Granted Feb 11, 2020·4 cites·19 claims
- 0591US10118263B2Monolithic manifold mask and substrate conceptsLAM RES CORP·Filed 2015·Granted Nov 6, 2018·11 cites·13 claims
- 0685US7192037B1Lid assembly and method of usePENA CHRISTOPHER·Filed 2005·Granted Mar 20, 2007·18 cites·12 claims
- 0781US7735177B1Brush core assemblyLAM RES CORP·Filed 2006·Granted Jun 15, 2010·11 cites·18 claims
- 0880US8959704B1Debris collection devicesPENA CHRISTOPHER·Filed 2013·Granted Feb 24, 2015·7 cites·9 claims
- 0978US11764086B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2022·Granted Sep 19, 2023·0 cites·18 claims
- 1077US10790174B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2018·Granted Sep 29, 2020·1 cites·10 claims
- 1174US10914003B2Monolithic gas distribution manifold and various construction techniques and use cases thereforLAM RES CORP·Filed 2019·Granted Feb 9, 2021·0 cites·16 claims
- 1270US9929028B2Service tunnel for use on capital equipment in semiconductor manufacturing and research fabsLAM RES CORP·Filed 2016·Granted Mar 27, 2018·1 cites·20 claims
- 1359US6851151B1Brush drive assembly in a substrate processing brush boxLAM RES CORP·Filed 2002·Granted Feb 8, 2005·8 cites·21 claims
- 1456US2016111257A1Substrate for mounting gas supply components and methods thereofLAM RES CORP·Filed 2014·Application pending·0 cites
- 1555US10014196B2Wafer transport assembly with integrated buffersLAM RES CORP·Filed 2015·Granted Jul 3, 2018·0 cites·6 claims
- 1652US2023245862A1Delivery of high concentrations of molecular hydrogen and other gases to substrate processing systemsLAM RES CORP·Filed 2022·Application pending·0 cites
- 1751US6907637B1Edge wheel assembly in a substrate processing brush boxLAM RES CORP·Filed 2002·Granted Jun 21, 2005·4 cites·17 claims
Join the waitlist — get patent alerts
Get an alert when Christopher Pena files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →