Inventor · disambiguated record

Chui-Ya Peng

Also filed as: PENG CHUI-YA

31 granted patents·4 pending applications·37 citations·filing 2013–2024

95Inventor score

Technology areasH10P H01L H10D H10W

Files withTAIWAN SEMICONDUCTOR MFG CO LTD35

Top patents by PatentIndex Score

35 records

0197US12080567B2Systems and methods for in-situ Marangoni cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 3, 2024·3 cites·20 claims
0291US9589969B1Semiconductor device and manufacturing method of the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Mar 7, 2017·10 cites·20 claims
0388US11923210B2Systems and methods for in-situ Marangoni cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 5, 2024·3 cites·20 claims
0486US12482675B2Systems and methods for in-situ Marangoni cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Nov 25, 2025·0 cites·20 claims
0584US9780209B1Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Oct 3, 2017·5 cites·20 claims
0683US10515861B2Method for calibrating temperature in chemical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·3 cites·20 claims
0783US10319857B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jun 11, 2019·3 cites·20 claims
0882US12507472B2Method of making polysilicon structure including protective layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 23, 2025·0 cites·20 claims
0982US2024178013A1Systems and methods for in-situ marangoni cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
1081US10818563B2Method for calibrating temperature in chemical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 27, 2020·2 cites·20 claims
1181US10325796B2Apparatus and system for detecting wafer damageTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jun 18, 2019·4 cites·20 claims
1281US2025105037A1System and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
1380US12198953B2System and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 14, 2025·0 cites·20 claims
1477US9812570B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Nov 7, 2017·2 cites·20 claims
1575US10784079B2Ion implantation system and source bushing thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 22, 2020·1 cites·20 claims
1675US2024363377A1Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
1774US11721567B2System and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 8, 2023·0 cites·20 claims
1873US12068179B2Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 20, 2024·0 cites·20 claims
1971US11855086B2Polysilicon structure including protective layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 26, 2023·0 cites·20 claims
2069US11735440B2Automated wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 22, 2023·0 cites·20 claims
2168US11610825B2Method for calibrating temperature in chemical vapor depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 21, 2023·0 cites·20 claims
2268US11411108B2Semiconductor device and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 9, 2022·0 cites·20 claims
2367US11282673B2Ion implantation system and source bushing thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Mar 22, 2022·0 cites·20 claims
2462US11227780B2System and method for operating the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 18, 2022·0 cites·20 claims
2562US9978634B2Method for fabricating shallow trench isolation and semiconductor structure using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted May 22, 2018·1 cites·20 claims
2661US10818790B2Semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Oct 27, 2020·0 cites·20 claims
2760US11355366B2Systems and methods for shuttered wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 7, 2022·0 cites·19 claims
2860US10957697B2Polysilicon structure including protective layerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·14 claims
2957US11342202B2Automated wafer cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 24, 2022·0 cites·22 claims
3055US10050035B2Method of making protective layer over polysilicon structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 14, 2018·0 cites·20 claims
3148US11527380B2Ion implanter toxic gas delivery systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Dec 13, 2022·0 cites·20 claims
3247US9324603B2Semiconductor structures with shallow trench isolationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Apr 26, 2016·0 cites·23 claims
3341US2020058521A1Wafer cleaning with dynamic contactsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Application pending·0 cites
3440US11162174B2Liquid delivery and vaporization apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Nov 2, 2021·0 cites·20 claims
3537US11139183B2Systems and methods for dry wafer transportTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 5, 2021·0 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →