Inventor · disambiguated record
Chi-Kang Peng
Also filed as: PENG CHI-KANG
3 granted patents·69 citations·filing 1996–2007
73Inventor score
Top patents by PatentIndex Score
3 records- 0190US8264662B2In-line particle detection for immersion lithographyCHEN LI-JUI·Filed 2007·Granted Sep 11, 2012·17 cites·16 claims
- 0274US8091504B2Method and apparatus for cleaning spin coaterHSIEH CHUN-JEN·Filed 2006·Granted Jan 10, 2012·16 cites·16 claims
- 0357US5702624ACompete hot plate temperature control system for hot treatmentTAIWAN SEMICONDUCTORS MANFUACT·Filed 1996·Granted Dec 30, 1997·36 cites·6 claims
Join the waitlist — get patent alerts
Get an alert when Chi-Kang Peng files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →