Inventor · disambiguated record
Christian Pfahler
Also filed as: PFAHLER CHRISTIAN
8 granted patents·2 pending applications·9 citations·filing 2015–2024
78Inventor score
Top patents by PatentIndex Score
10 records- 0186US12027427B2Preheat processes for millisecond anneal systemMATTSON TECH INC·Filed 2020·Granted Jul 2, 2024·2 cites·10 claims
- 0285US11255606B2Gas flow control for millisecond anneal systemMATTSON TECH INC·Filed 2016·Granted Feb 22, 2022·5 cites·14 claims
- 0377US12476151B2Preheat processes for millisecond anneal systemBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Granted Nov 18, 2025·0 cites·14 claims
- 0475US10770309B2Features for improving process uniformity in a millisecond anneal systemMATTSON TECH INC·Filed 2016·Granted Sep 8, 2020·2 cites·10 claims
- 0568US12014920B2Apparatus for hydrogen assisted atmospheric radical oxidationMATTSON TECH INC·Filed 2022·Granted Jun 18, 2024·0 cites·15 claims
- 0659US11521847B2Hydrogen assisted atmospheric radical oxidationMATTSON TECH INC·Filed 2020·Granted Dec 6, 2022·0 cites·10 claims
- 0758US2025167008A1Gas delivery system for a thermal processing apparatusBEIJING E TOWN SEMICONDUCTOR TECH CO LTD·Filed 2024·Application pending·0 cites
- 0855US2020402811A1Features for Improving Process Uniformity in a Millisecond Anneal SystemMATTSON TECH INC·Filed 2020·Application pending·0 cites
- 0951US10727140B2Preheat processes for millisecond anneal systemMATTSON TECH INC·Filed 2016·Granted Jul 28, 2020·0 cites·14 claims
- 1037US10402291B2Checking device for data preparation unitBOSCH GMBH ROBERT·Filed 2015·Granted Sep 3, 2019·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →