Inventor · disambiguated record
Chirag Rajyaguru
Also filed as: RAJYAGURU CHIRAG
11 granted patents·3 pending applications·40 citations·filing 2011–2023
85Inventor score
Top patents by PatentIndex Score
14 records- 0195US8513629B2Droplet generator with actuator induced nozzle cleaningRAJYAGURU CHIRAG·Filed 2011·Granted Aug 20, 2013·24 cites·22 claims
- 0278US8829477B2Droplet generator with actuator induced nozzle cleaningRAJYAGURU CHIRAG·Filed 2013·Granted Sep 9, 2014·4 cites·22 claims
- 0376US9279445B2Droplet generator steering systemBAUMGART PETER M·Filed 2011·Granted Mar 8, 2016·5 cites·18 claims
- 0476US8969840B2Droplet generator with actuator induced nozzle cleaningASML NETHERLANDS BV·Filed 2014·Granted Mar 3, 2015·3 cites·20 claims
- 0570US9544983B2Apparatus for and method of supplying target materialASML NETHERLANDS BV·Filed 2014·Granted Jan 10, 2017·1 cites·20 claims
- 0662US9699876B2Method of and apparatus for supply and recovery of target materialASML NETHERLANDS BV·Filed 2014·Granted Jul 4, 2017·3 cites·17 claims
- 0760US11317501B2Method of purifying target material for an EUV light sourceASML NETHERLANDS BV·Filed 2019·Granted Apr 26, 2022·0 cites·15 claims
- 0856US11690159B2Apparatus and method for extending target material delivery system lifetimeASML NETHERLANDS BV·Filed 2019·Granted Jun 27, 2023·0 cites·20 claims
- 0956US10426020B2Droplet generator steering systemASML NETHERLANDS BV·Filed 2016·Granted Sep 24, 2019·0 cites·20 claims
- 1053US10455680B2Method and apparatus for purifying target material for EUV light sourceASML NETHERLANDS BV·Filed 2016·Granted Oct 22, 2019·0 cites·17 claims
- 1152US2023164900A1Apparatus for and method of accelerating droplets in a droplet generator for an euv sourceASML NETHERLANDS BV·Filed 2021·Application pending·0 cites
- 1245US2025227834A1High pressure coupling assemblyASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 1340US10632505B2System method and apparatus for high pressure liquid jet cleaning of sintered filtersASML NETHERLANDS BV·Filed 2016·Granted Apr 28, 2020·0 cites·23 claims
- 1439US2015113123A1Method and apparatus for performing network discoveryERICSSON TELEFON AB L M·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →