Inventor · disambiguated record
Chidambara A. Ramalingam
Also filed as: RAMALINGAM CHIDAMBARA A
6 granted patents·11 pending applications·23 citations·filing 2008–2024
76Inventor score
Top patents by PatentIndex Score
17 records- 0185US7980000B2Vapor dryer having hydrophilic end effectorAPPLIED MATERIALS INC·Filed 2008·Granted Jul 19, 2011·13 cites·20 claims
- 0284US8205352B2Vapor dryer having hydrophilic end effectorLEWIS JOHN S·Filed 2011·Granted Jun 26, 2012·8 cites·20 claims
- 0380US12131934B2Semiconductor substrate support leveling apparatusAPPLIED MATERIALS INC·Filed 2020·Granted Oct 29, 2024·1 cites·7 claims
- 0472US2025054797A1Semiconductor substrate support leveling apparatusAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0567US11499229B2Substrate supports including metal-ceramic interfacesAPPLIED MATERIALS INC·Filed 2019·Granted Nov 15, 2022·1 cites·20 claims
- 0658US2025389022A1Heater materials to prevent arcingAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0757US2023302582A1Laser drilled faceplateAPPLIED MATERIALS INC·Filed 2022·Application pending·0 cites
- 0857US2025259835A1Method of integrated copper oxide removal and low k repair processAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0956US2025357107A1Rf pulsing assisted low-k material deposition with high densityAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1052US2019376202A1Enhanced anodization for processing equipmentAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 1151US11851758B2Fabrication of a high temperature showerheadAPPLIED MATERIALS INC·Filed 2021·Granted Dec 26, 2023·0 cites·11 claims
- 1248US11848218B2Semiconductor chamber component cleaning systemsAPPLIED MATERIALS INC·Filed 2020·Granted Dec 19, 2023·0 cites·11 claims
- 1348US2025179639A1Hardware design with independent control to improve wiw uniformityAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1447US2022351951A1Substrate support apparatus, methods, and systems having elevated surfaces for heat transferAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 1545US2021287924A1Semiconductor substrate support with wafer backside damage controlAPPLIED MATERIALS INC·Filed 2020·Application pending·0 cites
- 1642US2009217953A1Drive roller for a cleaning systemCHEN HUI·Filed 2008·Application pending·0 cites
- 1736US2017352569A1Electrostatic chuck having properties for optimal thin film deposition or etch processesAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →