Inventor · disambiguated record
Chenfei Shen
Also filed as: SHEN CHENFEI
4 granted patents·2 pending applications·0 citations·filing 2019–2024
53Inventor score
Top patents by PatentIndex Score
6 records- 0163US12062545B2Fluorine-free tungsten ALD for dielectric selectivity improvementAPPLIED MATERIALS INC·Filed 2021·Granted Aug 13, 2024·0 cites·13 claims
- 0259US2021384035A1Fluorine-Free Tungsten ALD And Tungsten Selective CVD For DielectricsAPPLIED MATERIALS INC·Filed 2021·Application pending·0 cites
- 0358US11223039B2Anodes for sodium-ion batteriesUNIV SOUTHERN CALIFORNIA·Filed 2019·Granted Jan 11, 2022·0 cites·20 claims
- 0456US2025261423A1Formation of gate all around deviceAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0554US11830725B2Method of cleaning a structure and method of depositing a capping layer in a structureAPPLIED MATERIALS INC·Filed 2021·Granted Nov 28, 2023·0 cites·20 claims
- 0653US12305278B2Method of reducing titanium nitride etching during tungsten film formationAPPLIED MATERIALS INC·Filed 2020·Granted May 20, 2025·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →