Inventor · disambiguated record
Chunhua Song
Also filed as: SONG CHUNHUA
3 granted patents·2 pending applications·6 citations·filing 2018–2022
58Inventor score
Files withINFICON INC5
Top patents by PatentIndex Score
5 records- 0186US11929270B2Unconsumed precursor monitoringINFICON INC·Filed 2022·Granted Mar 12, 2024·2 cites·22 claims
- 0279US11335575B2Unconsumed precursor monitoringINFICON INC·Filed 2018·Granted May 17, 2022·4 cites·22 claims
- 0349US2024329001A1Quartz crystal microbalance (qcm) sensor having rapid registration responseINFICON INC·Filed 2022·Application pending·0 cites
- 0449US2024241083A1System and method for deconvolution of real-time mass from the influence of temperature and pressure on crystal microbalanceINFICON INC·Filed 2022·Application pending·0 cites
- 0543US12266552B2System and method for monitoring semiconductor processesINFICON INC·Filed 2021·Granted Apr 1, 2025·0 cites·26 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →