Inventor · disambiguated record
Cheng Sun
Also filed as: SUN CHENG · SUN CHENG-KO J
8 granted patents·5 pending applications·101 citations·filing 1990–2024
84Inventor score
Top patents by PatentIndex Score
13 records- 0190US11053590B2Nozzle for uniform plasma processingAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·3 cites·10 claims
- 0287US10465288B2Nozzle for uniform plasma processingAPPLIED MATERIALS INC·Filed 2014·Granted Nov 5, 2019·4 cites·10 claims
- 0376US5059475AApparatus and method of forming optical waveguides on metalized substratesPHOTONIC INTEGRATION RES·Filed 1990·Granted Oct 22, 1991·47 cites·10 claims
- 0472US12463075B2Cathode assembly for integration of embedded electrostatic chuck (ESC)APPLIED MATERIALS INC·Filed 2024·Granted Nov 4, 2025·0 cites·20 claims
- 0572US5064266ACircular channel waveguides and lenses formed from rectangular channel waveguidesPHOTONIC INTEGRATION RES·Filed 1990·Granted Nov 12, 1991·38 cites·13 claims
- 0664US12424446B2Silicon (Si) dry etch for die-to-wafer thinningAPPLIED MATERIALS INC·Filed 2022·Granted Sep 23, 2025·0 cites·18 claims
- 0763US2023187215A1Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation processAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0857US2025054737A1Electrostatic Chuck with High Cooling EfficiencyAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 0956US11600492B2Electrostatic chuck with reduced current leakage for hybrid laser scribing and plasma etch wafer singulation processAPPLIED MATERIALS INC·Filed 2019·Granted Mar 7, 2023·0 cites·20 claims
- 1054US2025062129A1DIE BACKSIDE PROFILE for SEMICONDUCTOR DEVICESAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1154US2025273498A1Embedded electrostatic chuck (esc)APPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 1250US2024266220A1Integrated laser and plasma etch dicingAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1340US5261022AOptical waveguide of silica glass film on ceramic substratePHOTONIC INTEGRATION RES·Filed 1991·Granted Nov 9, 1993·9 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →