Inventor · disambiguated record
Chester A. Szwejkowski
Also filed as: SZWEJKOWSKI CHESTER · SZWEJKOWSKI CHESTER A
4 granted patents·268 citations·filing 1990–1992
82Inventor score
Technology areasH10P
Files withAPPLIED MATERIALS INC4
Top patents by PatentIndex Score
4 records- 0186US5338398ATungsten silicide etch process selective to photoresist and oxideAPPLIED MATERIALS INC·Filed 1992·Granted Aug 16, 1994·148 cites·23 claims
- 0267US5147499AProcess for removal of residues remaining after etching polysilicon layer in formation of integrated circuit structureAPPLIED MATERIALS INC·Filed 1991·Granted Sep 15, 1992·45 cites·19 claims
- 0364US5228950ADry process for removal of undesirable oxide and/or silicon residues from semiconductor wafer after processingAPPLIED MATERIALS INC·Filed 1990·Granted Jul 20, 1993·47 cites·23 claims
- 0455US5296093AProcess for removal of residues remaining after etching polysilicon layer in formation of integrated circuit structureAPPLIED MATERIALS INC·Filed 1992·Granted Mar 22, 1994·28 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →