Inventor · disambiguated record
Chihiro Tamura
Also filed as: TAMURA CHIHIRO
3 granted patents·5 pending applications·0 citations·filing 2012–2023
40Inventor score
Top patents by PatentIndex Score
8 records- 0155US2024212711A1Film forming apparatusRESONAC CORP·Filed 2023·Application pending·0 cites
- 0253US12349434B2Manufacturing method for semiconductor deviceTOKYO ELECTRON LTD·Filed 2021·Granted Jul 1, 2025·0 cites·9 claims
- 0349US2025305147A1Metal-containing film and method for producing metal-containing filmTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0449US2024150889A1Substrate holder, substrate holding method, and film formation apparatusRESONAC CORP·Filed 2023·Application pending·0 cites
- 0547US9418837B2Semiconductor device manufacturing method and substrate treatment systemTOKYO ELECTRON LTD·Filed 2014·Granted Aug 16, 2016·0 cites·7 claims
- 0643US10008564B2Method of corner rounding and trimming of nanowires by microwave plasmaTOKYO ELECTRON LTD·Filed 2016·Granted Jun 26, 2018·0 cites·19 claims
- 0743US2024304439A1Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0833US2014242808A1Semiconductor device manufacturing method and substrate processing systemAKIYAMA KOJI·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →