Inventor · disambiguated record
Chikai Tanaka
Also filed as: TANAKA CHIKAI
5 granted patents·3 pending applications·57 citations·filing 1999–2002
78Inventor score
Technology areasH10P
Top patents by PatentIndex Score
8 records- 0168US6360687B1Wafer flattening systemSPEEDFAM IPEC CO LTD·Filed 1999·Granted Mar 26, 2002·38 cites·16 claims
- 0255US6451217B1Wafer etching methodSPEEDFAM IPEC CO LTD·Filed 2000·Granted Sep 17, 2002·5 cites·8 claims
- 0341US6254718B1Combined CMP and plasma etching wafer flattening systemSPEEDFAM CO LTD·Filed 1999·Granted Jul 3, 2001·9 cites·3 claims
- 0436US2001036741A1Local etching apparatus and local etching methodFiled 2001·Application pending·0 cites
- 0535US7005032B2Wafer table for local dry etching apparatusSPEEDFAM CO LTD·Filed 2002·Granted Feb 28, 2006·0 cites·4 claims
- 0635US6302995B1Local etching apparatusSPEEDFAM IPEC CO LTD·Filed 1999·Granted Oct 16, 2001·5 cites·10 claims
- 0735US2002008082A1Local etching apparatus and local etching methodSPEEDFAM CO LTD·Filed 2001·Application pending·0 cites
- 0834US2002144781A1Local etching methodFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →