Inventor · disambiguated record
Chih-Wei Wen
Also filed as: WEN CHIH-WEI
37 granted patents·23 pending applications·23 citations·filing 2003–2025
95Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD43EVERDISPLAY OPTRONICS (SHANGHAI) LTD5TAIWAN SEMICONDUCTOR MFG5MPI CORP2AU OPTRONICS CORP1
Top patents by PatentIndex Score
60 records- 0197US11614684B2Photomask inspection method and apparatus thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Mar 28, 2023·4 cites·20 claims
- 0296US12072621B2Photomask inspection method and apparatus thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 27, 2024·2 cites·20 claims
- 0395US11809076B2Cleaning method, method for forming semiconductor structure and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 7, 2023·2 cites·20 claims
- 0494US11340524B2Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 24, 2022·3 cites·20 claims
- 0590US2025355346A1Photomask inspection method and apparatus thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0689US12422744B2Photomask inspection method and apparatus thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Sep 23, 2025·0 cites·20 claims
- 0789US2025355342A1Pellicle assembly mounting for lithography maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0887US11822231B2Method for removing particles from pellicle and photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 21, 2023·1 cites·20 claims
- 0985US12400890B2Apparatus for fabricating a semiconductor device and method for fabricating semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 26, 2025·0 cites·20 claims
- 1085US2025316511A1Apparatus for fabricating a semiconductor device and method for fabricating semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1184US12153341B2Cleaning method, method for forming semiconductor structure and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Nov 26, 2024·0 cites·20 claims
- 1283US12242182B2Method for removing particles from pellicle and photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Mar 4, 2025·0 cites·20 claims
- 1383US2024385512A1Cleaning method, method for forming semiconductor structure and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1482US11088003B2Apparatus for fabricating a semiconductor device and method for fabricating semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 10, 2021·2 cites·20 claims
- 1580US2025138409A1Pellicle assembly mounting for lithography maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1679US12487531B2Extreme ultraviolet (EUV) radiation source apparatus, EUV lithography system, and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 2, 2025·0 cites·20 claims
- 1779US12405527B2Photomask, method of fabricating a photomask, and method of fabricating a semiconductor structure using a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 2, 2025·0 cites·20 claims
- 1879US10775694B1Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 15, 2020·1 cites·20 claims
- 1978US8693180B2Display moduleHSU JIA-LANG·Filed 2011·Granted Apr 8, 2014·3 cites·15 claims
- 2078US2024393680A1Photomask cleaning toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2177US2024385543A1Cleaning apparatus for cleaning surface of photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2276US10983430B2Mask assembly and haze acceleration methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 20, 2021·1 cites·17 claims
- 2376US2025355375A1Pellicle, pellicle removal tool, and method of utilizing pellicle and pellicle removal toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 2474US2024393679A1Device and method for cleaning pellicle frame and membraneTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2573US12009238B2Apparatus for fabricating a semiconductor device and method for fabricating semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 11, 2024·0 cites·20 claims
- 2673US11239001B2Method for generating extreme ultraviolet radiation and an extreme ultraviolet (EUV) radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Feb 1, 2022·2 cites·20 claims
- 2772US12399439B2Pellicle, pellicle removal tool, and method of utilizing pellicle and pellicle removal toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 26, 2025·0 cites·20 claims
- 2872US2024379464A1Apparatus and methods for three dimensional reticle defect smart repairTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2971US11347143B2Cleaning method, method for forming semiconductor structure and system thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 31, 2022·0 cites·20 claims
- 3070US11294275B2Apparatus for mounting a pellicle to a photomask and method for mounting a pellicle to a photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Apr 5, 2022·0 cites·20 claims
- 3169US11703752B2Method of accelerated hazing of mask assemblyTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 18, 2023·0 cites·20 claims
- 3268US10038170B2Method for cutting display panelEVERDISPLAY OPTRONICS SHANGHAI LTD·Filed 2016·Granted Jul 31, 2018·1 cites·15 claims
- 3366US12282264B2Cleaning apparatus for cleaning surface of photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 22, 2025·0 cites·20 claims
- 3464US12085848B2Photomask cleaning toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 10, 2024·0 cites·20 claims
- 3564US2023333465A1Device and method for cleaning pellicle frame and membraneTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 3663US12189283B2Particle prevention method in reticle podTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jan 7, 2025·0 cites·20 claims
- 3762US8703364B2Method for repairing photomaskHSIEH KUN-LUNG·Filed 2012·Granted Apr 22, 2014·1 cites·19 claims
- 3862US2024369939A1Extreme ultraviolet (euv) radiation source apparatus, euv lithography system, and method for generating extreme ultraviolet radiationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 3961US2024003827A1Systems and methods for actinic mask inspection and review in vacuumTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 4060US2022285226A1Apparatus and methods for three dimensional reticle defect smart repairTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Application pending·0 cites
- 4159US9271407B2Display moduleAU OPTRONICS CORP·Filed 2013·Granted Feb 23, 2016·0 cites·8 claims
- 4259US2025239431A1Electron microscope detector and related methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4357US2025180979A1Mask repair apparatus and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 4456US2024118313A1Probe head having spring probesMPI CORP·Filed 2023·Application pending·0 cites
- 4555US12124758B2Multi-host system and operation sharing methodGENESYS LOGIC INC·Filed 2023·Granted Oct 22, 2024·0 cites·23 claims
- 4655US8999610B2Lithography mask repairing processTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Apr 7, 2015·0 cites·21 claims
- 4753US9312101B2Endpoint detection for photolithography mask repairTAIWAN SEMICONDUCTOR MFG·Filed 2015·Granted Apr 12, 2016·0 cites·20 claims
- 4852US2024422888A1Extreme ultraviolet light source with thermal stabilizationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 4950US9530983B2Sintering method and display device packaging method using the sameEVERDISPLAY OPTRONICS (SHANGHAI) LTD·Filed 2015·Granted Dec 27, 2016·0 cites·10 claims
- 5049US11703754B2Particle prevention method in reticle podTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 18, 2023·0 cites·20 claims
Showing the top 50 of 60 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →