Inventor · disambiguated record

Chi-How Wu

Also filed as: WU CHI-HOW

3 granted patents·46 citations·filing 2000–2003

67Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG3

Top patents by PatentIndex Score

3 records

0184US6283131B1In-situ strip process for polysilicon etching in deep sub-micron technologyTAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Sep 4, 2001·39 cites·19 claims
0252US7018929B2Method for reducing a low volatility byproduct from a wafer surface following an etching processTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 28, 2006·7 cites·20 claims
0338USRE40007EIn-situ strip process for polysilicon etching in deep sub-micron technologyTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Jan 22, 2008·0 cites·55 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →