Inventor · disambiguated record
Changsik Yoon
Also filed as: YOON CHANGSIK
1 granted patent·3 pending applications·0 citations·filing 2020–2024
1Inventor score
Top patents by PatentIndex Score
4 records- 0162US2025208522A1Illumination module and associated methods and metrology apparatusASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0251US2025231499A1Method and apparatus for illumination adjustmentASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0347US2025290747A1Optical arrangement for a metrology systemASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0435US12085445B2Absolute linear-in-k spectrometerUNIV ROCHESTER·Filed 2020·Granted Sep 10, 2024·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →