Inventor · disambiguated record
Charles B. Zarowin
Also filed as: ZAROWIN CHARLES · ZAROWIN CHARLES B
15 granted patents·1,218 citations·filing 1981–1996
95Inventor score
Top patents by PatentIndex Score
15 records- 0198US4431898AInductively coupled discharge for plasma etching and resist strippingPERKIN ELMER CORP·Filed 1981·Granted Feb 14, 1984·162 cites·6 claims
- 0296US5290382AMethods and apparatus for generating a plasma for "downstream" rapid shaping of surfaces of substrates and filmsHUGHES AIRCRAFT CO·Filed 1991·Granted Mar 1, 1994·418 cites·8 claims
- 0393US4668366AOptical figuring by plasma assisted chemical transport and etching apparatus thereforPERKIN ELMER CORP·Filed 1985·Granted May 26, 1987·60 cites·10 claims
- 0491US5106827APlasma assisted oxidation of perovskites for forming high temperature superconductors using inductively coupled dischargesPERKIN ELMER CORP·Filed 1991·Granted Apr 21, 1992·121 cites·5 claims
- 0588US5336355AMethods and apparatus for confinement of a plasma etch region for precision shaping of surfaces of substances and filmsHUGHES AIRCRAFT CO·Filed 1991·Granted Aug 9, 1994·65 cites·11 claims
- 0686US5298103AElectrode assembly useful in confined plasma assisted chemical etchingHUGHES AIRCRAFT CO·Filed 1993·Granted Mar 29, 1994·50 cites·13 claims
- 0786US5238532AMethod and apparatus for removal of subsurface damage in semiconductor materials by plasma etchingHUGHES AIRCRAFT CO·Filed 1992·Granted Aug 24, 1993·52 cites·27 claims
- 0883US5254830ASystem for removing material from semiconductor wafers using a contained plasmaHUGHES AIRCRAFT CO·Filed 1991·Granted Oct 19, 1993·79 cites·18 claims
- 0981US5376224AMethod and apparatus for non-contact plasma polishing and smoothing of uniformly thinned substratesHUGHES AIRCRAFT CO·Filed 1992·Granted Dec 27, 1994·38 cites·18 claims
- 1077US5811021APlasma assisted chemical transport method and apparatusHUGHES ELECTRONICS CORP·Filed 1995·Granted Sep 22, 1998·50 cites·38 claims
- 1175US5291415AMethod to determine tool paths for thinning and correcting errors in thickness profiles of filmsHUGHES AIRCRAFT CO·Filed 1991·Granted Mar 1, 1994·61 cites·27 claims
- 1267US4647512ADiamond-like carbon films and process for production thereofPERKIN ELMER CORP·Filed 1986·Granted Mar 3, 1987·29 cites·10 claims
- 1350US5641546APassivation of electronic modules using high density plasmasHUGHES AIRCRAFT CO·Filed 1996·Granted Jun 24, 1997·17 cites·13 claims
- 1446US5148319ASystem for fabricating micro optical elementsHUGHES AIRCRAFT CO·Filed 1991·Granted Sep 15, 1992·11 cites·13 claims
- 1534US6379490B1System for improving the total thickness variation of a waferSPEEDFAM IPEC CORP·Filed 1996·Granted Apr 30, 2002·5 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →