Inventor · disambiguated record
Conan Chiang
Also filed as: CHIANG CONAN
7 granted patents·2 pending applications·45 citations·filing 2001–2021
79Inventor score
Technology areasH10P
Top patents by PatentIndex Score
9 records- 0183US6617257B2Method of plasma etching organic antireflective coatingLAM RES CORP·Filed 2001·Granted Sep 9, 2003·35 cites·20 claims
- 0271US8357434B1Apparatus for the deposition of a conformal film on a substrate and methods thereforLAM RES CORP·Filed 2005·Granted Jan 22, 2013·3 cites·20 claims
- 0360US7476610B2Removable spacerLAM RES CORP·Filed 2006·Granted Jan 13, 2009·1 cites·19 claims
- 0457US7413988B1Method and apparatus for detecting planarization of metal films prior to clearingLAM RES CORP·Filed 2003·Granted Aug 19, 2008·6 cites·16 claims
- 0552US7690966B1Method and apparatus for detecting planarization of metal films prior to clearingLAM RES CORP·Filed 2008·Granted Apr 6, 2010·0 cites·5 claims
- 0650US9384979B2Apparatus for the deposition of a conformal film on a substrate and methods thereforLAM RES CORP·Filed 2012·Granted Jul 5, 2016·0 cites·9 claims
- 0749US2023223292A1Flat bottom shadow ringLAM RES CORP·Filed 2021·Application pending·0 cites
- 0845US8592318B2Pitch reduction using oxide spacerKIM JISOO·Filed 2008·Granted Nov 26, 2013·0 cites·18 claims
- 0941US2007181530A1Reducing line edge roughnessLAM RES CORP·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →