Inventor · disambiguated record
Curtis Bailey
Also filed as: BAILEY CURTIS · BAILEY CURTIS W · BAILEY CURTIS WARREN
15 granted patents·7 pending applications·68 citations·filing 2010–2024
92Inventor score
Top patents by PatentIndex Score
22 records- 0197US11725283B2PECVD deposition system for deposition on selective side of the substrateLAM RES CORP·Filed 2021·Granted Aug 15, 2023·5 cites·13 claims
- 0297US11441222B2PECVD deposition system for deposition on selective side of the substrateLAM RES CORP·Filed 2021·Granted Sep 13, 2022·7 cites·20 claims
- 0396US11365479B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2020·Granted Jun 21, 2022·8 cites·16 claims
- 0496US10851457B2PECVD deposition system for deposition on selective side of the substrateLAM RES CORP·Filed 2017·Granted Dec 1, 2020·14 cites·13 claims
- 0594US12227837B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Feb 18, 2025·2 cites·19 claims
- 0694US10760158B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2018·Granted Sep 1, 2020·14 cites·23 claims
- 0790US11851760B2PECVD deposition system for deposition on selective side of the substrateLAM RES CORP·Filed 2021·Granted Dec 26, 2023·1 cites·11 claims
- 0887US10354857B2High power low pressure UV bulb with plasma resistant coatingLAM RES CORP·Filed 2016·Granted Jul 16, 2019·6 cites·18 claims
- 0986US2024309507A1Pecvd deposition system for deposition on selective side of the substrateLAM RES CORP·Filed 2024·Application pending·0 cites
- 1084US11512393B2Dynamic sheath control with edge ring liftLAM RES CORP·Filed 2018·Granted Nov 29, 2022·3 cites·20 claims
- 1182US10872747B2Controlling showerhead heating via resistive thermal measurementsLAM RES CORP·Filed 2018·Granted Dec 22, 2020·4 cites·25 claims
- 1279US12163219B2Ex situ coating of chamber components for semiconductor processingLAM RES CORP·Filed 2022·Granted Dec 10, 2024·0 cites·19 claims
- 1379US8628618B2Precursor vapor generation and delivery system with filters and filter monitoring systemSLEVIN DAMIEN·Filed 2010·Granted Jan 14, 2014·4 cites·10 claims
- 1473US2021108314A1Methods for Depositing a Film on a Backside of a SubstrateLAM RES CORP·Filed 2020·Application pending·0 cites
- 1570US12480208B2Dynamic sheath control with edge ring liftLAM RES CORP·Filed 2022·Granted Nov 25, 2025·0 cites·20 claims
- 1665US2025305128A1Multi-zone gas distribution for asymmetric wafer bow compensationLAM RES CORP·Filed 2023·Application pending·0 cites
- 1752US2025372357A1Parasitic plasma suppressorLAM RES CORP·Filed 2023·Application pending·0 cites
- 1849US2022093366A1Showerhead for deposition tools having multiple plenums and gas distribution chambersLAM RES CORP·Filed 2020·Application pending·0 cites
- 1948US9637821B2Method for supplying vaporized precursorLAM RES CORP·Filed 2013·Granted May 2, 2017·0 cites·11 claims
- 2046US2023052089A1In situ surface coating of process chamberLAM RES CORP·Filed 2021·Application pending·0 cites
- 2145US2022333239A1Tunable and non-tunable heat shields to affect temperature distribution profiles of substrate supportsLAM RES CORP·Filed 2020·Application pending·0 cites
- 2236US10240236B2Clean resistant windows for ultraviolet thermal processingLAM RES CORP·Filed 2015·Granted Mar 26, 2019·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →