Inventor · disambiguated record
David E. Aspnes
Also filed as: ASPNES DAVID E · ASPNES DAVID ERIK
23 granted patents·1,819 citations·filing 1975–2006
97Inventor score
Files withTHERMA WAVE INC13BELL TELEPHONE LABOR INC4BELL COMMUNICATIONS RES3AT & T BELL LAB1KLA TENCOR CORP1
Top patents by PatentIndex Score
23 records- 0198US5900939AThin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1998·Granted May 4, 1999·174 cites·13 claims
- 0298US5877859ABroadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 1996·Granted Mar 2, 1999·202 cites·66 claims
- 0398US5798837AThin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1997·Granted Aug 25, 1998·233 cites·27 claims
- 0497US5091320AEllipsometric control of material growthBELL COMMUNICATIONS RES·Filed 1990·Granted Feb 25, 1992·259 cites·17 claims
- 0596US3985447AMeasurement of thin films by polarized lightBELL TELEPHONE LABOR INC·Filed 1975·Granted Oct 12, 1976·87 cites·13 claims
- 0695US6411385B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2001·Granted Jun 25, 2002·54 cites·12 claims
- 0795US6320657B1Broadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 2000·Granted Nov 20, 2001·56 cites·9 claims
- 0894US4332833AMethod for optical monitoring in materials fabricationBELL TELEPHONE LABOR INC·Filed 1980·Granted Jun 1, 1982·89 cites·20 claims
- 0993US5973787ABroadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 1998·Granted Oct 26, 1999·91 cites·26 claims
- 1093US4931132AOptical control of deposition of crystal monolayersBELL COMMUNICATIONS RES·Filed 1988·Granted Jun 5, 1990·157 cites·19 claims
- 1192US4357179AMethod for producing devices comprising high density amorphous silicon or germanium layers by low pressure CVD techniqueBELL TELEPHONE LABOR INC·Filed 1980·Granted Nov 2, 1982·100 cites·22 claims
- 1291US6304326B1Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1999·Granted Oct 16, 2001·72 cites·28 claims
- 1388US6449043B2Broadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 2001·Granted Sep 10, 2002·21 cites·7 claims
- 1487US6134012ABroadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 1999·Granted Oct 17, 2000·50 cites·10 claims
- 1581US6831743B2Broadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 2003·Granted Dec 14, 2004·14 cites·14 claims
- 1680US7355708B2Normal incidence rotating compensator ellipsometerKLA TENCOR CORP·Filed 2006·Granted Apr 8, 2008·5 cites·20 claims
- 1780US4492466ACylindrical grating monochromator for synchrotron radiationAT & T BELL LAB·Filed 1982·Granted Jan 8, 1985·30 cites·5 claims
- 1879US5277747AExtraction of spatially varying dielectric function from ellipsometric dataBELL COMMUNICATIONS RES·Filed 1992·Granted Jan 11, 1994·47 cites·11 claims
- 1976US6650415B2Broadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 2002·Granted Nov 18, 2003·11 cites·24 claims
- 2074US7173700B2Normal incidence rotating compensator ellipsometerTHERMA WAVE INC·Filed 2004·Granted Feb 6, 2007·9 cites·18 claims
- 2174US6181421B1Ellipsometer and polarimeter with zero-order plate compensatorTHERMA WAVE INC·Filed 1999·Granted Jan 30, 2001·44 cites·34 claims
- 2252US6411381B1Method of reducing noise generated by arc lamps in optical systems employing slitsUNIV NORTH CAROLINA STATE·Filed 2000·Granted Jun 25, 2002·4 cites·23 claims
- 2335US4380490AMethod of preparing semiconductor surfacesBELL TELEPHONE LABOR INC·Filed 1981·Granted Apr 19, 1983·10 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →