Inventor · disambiguated record
Daniel Babbs
Also filed as: BABBS DANIEL · BABBS DANIEL A
46 granted patents·9 pending applications·1,056 citations·filing 1994–2024
98Inventor score
Files withMOLECULAR IMPRINTS INC17BROOKS AUTOMATION INC13BROOKS AUTOMATION US LLC5BUFANO MICHAEL L5PROGRESSIVE SYS TECH INC5
Top patents by PatentIndex Score
55 records- 0197US7636999B2Method of retaining a substrate to a wafer chuckMOLECULAR IMPRINTS INC·Filed 2005·Granted Dec 29, 2009·49 cites·18 claims
- 0297US7019819B2Chucking system for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2002·Granted Mar 28, 2006·73 cites·24 claims
- 0396US11235935B2Substrate transport apparatusBROOKS AUTOMATION INC·Filed 2021·Granted Feb 1, 2022·3 cites·33 claims
- 0496US7635445B2Method of separating a mold from a solidified layer disposed on a substrateMOLECULAR IMPRINTS INC·Filed 2005·Granted Dec 22, 2009·33 cites·15 claims
- 0596US7224443B2Imprint lithography substrate processing tool for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2006·Granted May 29, 2007·26 cites·22 claims
- 0695US9224628B2Reduced capacity carrier, transport, load port, buffer systemBROOKS AUTOMATION INC·Filed 2012·Granted Dec 29, 2015·16 cites·17 claims
- 0795US9105673B2Side opening unified podBABBS DANIEL·Filed 2008·Granted Aug 11, 2015·41 cites·18 claims
- 0895US7798801B2Chucking system for nano-manufacturingMOLECULAR IMPRINTS INC·Filed 2005·Granted Sep 21, 2010·25 cites·18 claims
- 0995US6805054B1Method, system and holder for transferring templates during imprint lithography processesMOLECULAR IMPRINTS INC·Filed 2003·Granted Oct 19, 2004·73 cites·20 claims
- 1094US8272827B2Reduced capacity carrier, transport, load port, buffer systemBUFANO MICHAEL L·Filed 2007·Granted Sep 25, 2012·26 cites·5 claims
- 1194US6982783B2Chucking system for modulating shapes of substratesMOLECULAR IMPRINTS INC·Filed 2004·Granted Jan 3, 2006·37 cites·20 claims
- 1292US7090716B2Single phase fluid imprint lithography methodUNIV TEXAS·Filed 2003·Granted Aug 15, 2006·76 cites·30 claims
- 1391US7798758B2Reduced capacity carrier, transport, load port, buffer systemBROOKS AUTOMATION INC·Filed 2006·Granted Sep 21, 2010·16 cites·8 claims
- 1491US7292326B2Interferometric analysis for the manufacture of nano-scale devicesMOLECULAR IMPRINTS INC·Filed 2004·Granted Nov 6, 2007·47 cites·23 claims
- 1590US8267634B2Reduced capacity carrier, transport, load port, buffer systemBUFANO MICHAEL L·Filed 2007·Granted Sep 18, 2012·19 cites·9 claims
- 1689US12162698B2Substrate transport apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Dec 10, 2024·1 cites·33 claims
- 1789US8328495B2Reduced capacity carrier, transport, load port, buffer systemBUFANO MICHAEL L·Filed 2009·Granted Dec 11, 2012·13 cites·17 claims
- 1889US8033815B2Chucking system for nano-manufacturingMOLECULAR IMPRINTS INC·Filed 2010·Granted Oct 11, 2011·7 cites·7 claims
- 1987US11658051B2Substrate transportBROOKS AUTOMATION US LLC·Filed 2021·Granted May 23, 2023·1 cites·23 claims
- 2087US10395959B2Substrate transportBROOKS AUTOMATION INC·Filed 2014·Granted Aug 27, 2019·6 cites·44 claims
- 2187US6729462B2Edge grip aligner with buffering capabilitiesASYST TECHNOLOGIES·Filed 2003·Granted May 4, 2004·37 cites·17 claims
- 2287US6326755B1System for parallel processing of workpiecesASYST TECHNOLOGIES·Filed 2000·Granted Dec 4, 2001·46 cites·32 claims
- 2385US8827618B2Transport systemBABBS DANIEL·Filed 2012·Granted Sep 9, 2014·7 cites·20 claims
- 2485US6520727B1Modular sorterASYT TECHNOLOGIES INC·Filed 2000·Granted Feb 18, 2003·47 cites·43 claims
- 2584US8297319B2Carrier gas system and coupling substrate carrier to a loadportBABBS DANIEL·Filed 2007·Granted Oct 30, 2012·9 cites·8 claims
- 2683US10679882B2Reduced capacity carrier, transport, load port, buffer systemBROOKS AUTOMATION INC·Filed 2015·Granted Jun 9, 2020·3 cites·16 claims
- 2782US11545380B2Transport apparatus with linear bearingBROOKS AUTOMATION INC·Filed 2019·Granted Jan 3, 2023·2 cites·16 claims
- 2882US7630067B2Interferometric analysis method for the manufacture of nano-scale devicesMOLECULAR IMPRINTS INC·Filed 2004·Granted Dec 8, 2009·18 cites·12 claims
- 2982US7270533B2System for creating a turbulent flow of fluid between a mold and a substrateMOLECULAR IMPRINTS INC·Filed 2004·Granted Sep 18, 2007·38 cites·27 claims
- 3082US5853214AAligner for a substrate carrierPROGRESSIVE SYS TECH INC·Filed 1995·Granted Dec 29, 1998·87 cites·50 claims
- 3181US7665981B2System to transfer a template transfer body between a motion stage and a docking plateMOLECULAR IMPRINTS INC·Filed 2005·Granted Feb 23, 2010·9 cites·23 claims
- 3281US2025069939A1Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2024·Application pending·0 cites
- 3379US9978623B2Side opening unified podBROOKS AUTOMATION INC·Filed 2015·Granted May 22, 2018·2 cites·14 claims
- 3478US7880872B2Interferometric analysis method for the manufacture of nano-scale devicesMOLECULAR IMPRINTS INC·Filed 2009·Granted Feb 1, 2011·8 cites·20 claims
- 3577US11121015B2Substrate transportBROOKS AUTOMATION INC·Filed 2019·Granted Sep 14, 2021·1 cites·32 claims
- 3677US5785186ASubstrate housing and docking systemPROGRESSIVE SYS TECH INC·Filed 1994·Granted Jul 28, 1998·55 cites·39 claims
- 3775US11978648B2Substrate transportBOOKS AUTOMATION US LLC·Filed 2023·Granted May 7, 2024·0 cites·18 claims
- 3871US7531025B2Method of creating a turbulent flow of fluid between a mold and a substrateMOLECULAR IMPRINTS INC·Filed 2004·Granted May 12, 2009·20 cites·26 claims
- 3970US12142505B2Transport apparatus with linear bearingBROOKS AUTOMATION US LLC·Filed 2022·Granted Nov 12, 2024·0 cites·32 claims
- 4070US6591960B2Edge grip aligner with buffering capabilitiesASYST TECHNOLOGIES·Filed 2001·Granted Jul 15, 2003·12 cites·22 claims
- 4167US12142511B2Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2013·Granted Nov 12, 2024·1 cites·34 claims
- 4260US11201070B2Side opening unified podBROOKS AUTOMATION INC·Filed 2018·Granted Dec 14, 2021·0 cites·29 claims
- 4359US5984116ASubstrate support apparatus for a substrate housingPROGRESSIVE SYSTEMS TECHNOLOGI·Filed 1997·Granted Nov 16, 1999·23 cites·12 claims
- 4455US12206342B2Substrate processing apparatusBROOKS AUTOMATION US LLC·Filed 2022·Granted Jan 21, 2025·0 cites·37 claims
- 4555US5823361ASubstrate support apparatus for a substrate housingPROGRESSIVE SYS TECH INC·Filed 1996·Granted Oct 20, 1998·17 cites·28 claims
- 4652US2016329234A1Substrate processing apparatusBROOKS AUTOMATION INC·Filed 2016·Application pending·0 cites
- 4751US2008107507A1Reduced capacity carrier, transport, load port, buffer systemBUFANO MICHAEL L·Filed 2007·Application pending·0 cites
- 4851US2010314803A1Chucking System for Nano-ManufacturingMOLECULAR IMPRINTS INC·Filed 2010·Application pending·0 cites
- 4950US5664926AStage assembly for a substrate processing systemPROGRESSIVE SYS TECH INC·Filed 1995·Granted Sep 9, 1997·20 cites·20 claims
- 5046US2011008136A1Reduced capacity carrier, transport load port, buffer systemBROOKS AUTOMATION INC·Filed 2010·Application pending·0 cites
Showing the top 50 of 55 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →