Inventor · disambiguated record
David Chen
Also filed as: CHEN DAVID · CHEN DAVID L · CHEN DAVID LEE
8 granted patents·1 pending application·665 citations·filing 2002–2013
90Inventor score
Top patents by PatentIndex Score
9 records- 0198US6867086B1Multi-step deposition and etch back gap fill processNOVELLUS SYSTEMS INC·Filed 2003·Granted Mar 15, 2005·475 cites·56 claims
- 0291US8058181B1Method for post-etch cleansCHEN DAVID L·Filed 2009·Granted Nov 15, 2011·42 cites·20 claims
- 0390US7569492B1Method for post-etch cleansNOVELLUS SYSTEMS INC·Filed 2008·Granted Aug 4, 2009·19 cites·16 claims
- 0486US6855225B1Single-tube interlaced inductively coupling plasma sourceNOVELLUS SYSTEMS INC·Filed 2003·Granted Feb 15, 2005·32 cites·14 claims
- 0586US6693043B1Method for removing photoresist from low-k films in a downstream plasma systemNOVELLUS SYSTEMS INC·Filed 2002·Granted Feb 17, 2004·56 cites·36 claims
- 0683US8435895B2Methods for stripping photoresist and/or cleaning metal regionsCHEN DAVID·Filed 2007·Granted May 7, 2013·11 cites·34 claims
- 0782US7390755B1Methods for post etch cleansNOVELLUS SYSTEMS INC·Filed 2002·Granted Jun 24, 2008·27 cites·15 claims
- 0874US9373497B2Methods for stripping photoresist and/or cleaning metal regionsNOVELLUS SYSTEMS INC·Filed 2013·Granted Jun 21, 2016·3 cites·20 claims
- 0945US2006032516A1Method for the recovery of ash rate following metal etchingNOVELLUS SYSTEMS INC·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →