Inventor · disambiguated record
David J. Coumou
Also filed as: COUMOU DAVID · COUMOU DAVID J
52 granted patents·14 pending applications·1,466 citations·filing 2001–2025
99Inventor score
Files withMKS INSTR INC25APPLIED MATERIALS INC19COUMOU DAVID J9ENI TECHNOLOGY INC5ADVANCED ENERGY IND INC3
Top patents by PatentIndex Score
66 records- 0199US8781415B1Distortion correction based feedforward control systems and methods for radio frequency power sourcesMKS INSTR INC·Filed 2013·Granted Jul 15, 2014·103 cites·22 claims
- 0299US8576013B2Power distortion-based servo control systems for frequency tuning RF power sourcesCOUMOU DAVID J·Filed 2011·Granted Nov 5, 2013·96 cites·39 claims
- 0399US8395322B2Phase and frequency control of a radio frequency generator from an external sourceCOUMOU DAVID J·Filed 2011·Granted Mar 12, 2013·97 cites·25 claims
- 0499US8110991B2Phase and frequency control of a radio frequency generator from an external sourceCOUMOU DAVID J·Filed 2009·Granted Feb 7, 2012·93 cites·15 claims
- 0598US8773019B2Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processingCOUMOU DAVID J·Filed 2012·Granted Jul 8, 2014·93 cites·52 claims
- 0698US8289029B2Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc eventsCOUMOU DAVID J·Filed 2008·Granted Oct 16, 2012·56 cites·24 claims
- 0798US7602127B2Phase and frequency control of a radio frequency generator from an external sourceMKS INSTR INC·Filed 2005·Granted Oct 13, 2009·130 cites·11 claims
- 0897US10304669B1Adaptive counter measure control thwarting IMD jamming impairments for RF plasma systemsMKS INSTR INC·Filed 2018·Granted May 28, 2019·56 cites·35 claims
- 0997US8102954B2Frequency interference detection and correctionCOUMOU DAVID J·Filed 2005·Granted Jan 24, 2012·51 cites·6 claims
- 1096US8581597B2Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc eventsMKS INSTR INC·Filed 2012·Granted Nov 12, 2013·15 cites·24 claims
- 1195US10229816B2Solid-state impedance matching systems including a hybrid tuning network with a switchable coarse tuning network and a varactor fine tuning networkMKS INSTR INC·Filed 2016·Granted Mar 12, 2019·17 cites·43 claims
- 1295US6522121B2Broadband design of a probe analysis systemENI TECHNOLOGY INC·Filed 2001·Granted Feb 18, 2003·84 cites·27 claims
- 1394US11531312B2Adaptive control for a power generatorMKS INSTR INC·Filed 2021·Granted Dec 20, 2022·5 cites·16 claims
- 1494US9509266B2Feedback control and coherency of multiple power supplies in radio frequency power delivery systems for pulsed mode schemes in thin film processingMKS INSTR INC·Filed 2014·Granted Nov 29, 2016·21 cites·38 claims
- 1594US9041292B2Phase and frequency control of a radio frequency generator from an external sourceMKS INSTR INC·Filed 2013·Granted May 26, 2015·10 cites·19 claims
- 1694US8055203B2Multipoint voltage and current probe systemMKS INSTR INC·Filed 2007·Granted Nov 8, 2011·47 cites·27 claims
- 1794US8040068B2Radio frequency power control systemMKS INSTR INC·Filed 2009·Granted Oct 18, 2011·140 cites·46 claims
- 1893US9721758B2Unified RF power delivery single input, multiple output control for continuous and pulse mode operationMKS INSTR INC·Filed 2015·Granted Aug 1, 2017·30 cites·46 claims
- 1993US9336995B2Multiple radio frequency power supply control of frequency and phaseMKS INSTR INC·Filed 2014·Granted May 10, 2016·20 cites·29 claims
- 2093US8334700B2Arc detectionCOUMOU DAVID J·Filed 2010·Granted Dec 18, 2012·58 cites·14 claims
- 2192US10821542B2Pulse synchronization by monitoring power in another frequency bandMKS INSTR INC·Filed 2013·Granted Nov 3, 2020·24 cites·40 claims
- 2292US9041471B2Power distortion-based servo control systems for frequency tuning RF power sourcesMKS INSTR INC·Filed 2013·Granted May 26, 2015·15 cites·52 claims
- 2391US11990324B2Adaptive predictive control systemADVANCED ENERGY IND INC·Filed 2022·Granted May 21, 2024·2 cites·18 claims
- 2491US6707255B2Multirate processing for metrology of plasma RF sourceENI TECHNOLOGY INC·Filed 2002·Granted Mar 16, 2004·64 cites·22 claims
- 2590US10395895B2Feedback control by RF waveform tailoring for ion energy distributionMKS INSTR INC·Filed 2015·Granted Aug 27, 2019·6 cites·28 claims
- 2690US9876476B2Supervisory control of radio frequency (RF) impedance tuning operationMKS INSTR INC·Filed 2015·Granted Jan 23, 2018·7 cites·16 claims
- 2790US8264237B2Application of wideband sampling for arc detection with a probabilistic model for quantitatively measuring arc eventsCOUMOU DAVID J·Filed 2008·Granted Sep 11, 2012·12 cites·25 claims
- 2889US12142461B2Control and prediction of multiple plasma coupling surfaces and corresponding power transferAPPLIED MATERIALS INC·Filed 2022·Granted Nov 12, 2024·1 cites·17 claims
- 2989US9136093B2Synchronization of RF pulsing with RF metrology, processing, and controlMKS INSTR INC·Filed 2013·Granted Sep 15, 2015·9 cites·37 claims
- 3087US6983215B2RF metrology characterization for field installation and serviceability for the plasma processing industryMKS INSTR INC·Filed 2003·Granted Jan 3, 2006·37 cites·20 claims
- 3186US12183548B2High bandwidth architecture for centralized coherent control at the edge of processing toolAPPLIED MATERIALS INC·Filed 2022·Granted Dec 31, 2024·1 cites·18 claims
- 3284US11042140B2Adaptive control for a power generatorMKS INSTR INC·Filed 2019·Granted Jun 22, 2021·3 cites·27 claims
- 3384US6608446B1Method and apparatus for radio frequency (RF) metrologyENI TECHNOLOGY INC·Filed 2002·Granted Aug 19, 2003·19 cites·20 claims
- 3483US10910197B2Impedance matching network model based correction scheme and performance repeatabilityMKS INSTR INC·Filed 2018·Granted Feb 2, 2021·3 cites·19 claims
- 3582US10692698B2Feedback control by RF waveform tailoring for ion energy distributionMKS INSTR INC·Filed 2019·Granted Jun 23, 2020·2 cites·18 claims
- 3681US8190380B2Multipoint voltage and current probe systemCHOUEIRY RAY·Filed 2011·Granted May 29, 2012·8 cites·20 claims
- 3781US2025341818A1Multi-step predictive control systemADVANCED ENERGY IND INC·Filed 2025·Application pending·0 cites
- 3880US2025037973A1Control and prediction of multiple plasma coupling surfaces and corresponding power transferAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 3979US12503766B2Vapor concentration sensors for process chambersAPPLIED MATERIALS INC·Filed 2023·Granted Dec 23, 2025·0 cites·16 claims
- 4079US8040141B2Orthogonal radio frequency voltage/current sensor with high dynamic rangeMKS INSTR INC·Filed 2009·Granted Oct 18, 2011·9 cites·28 claims
- 4179US2025239981A1Impedance tuning utility of vector space defined by transmission line quantitiesAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 4275US2024393373A1Rf measurement from a transmission line sensorAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4374US12482641B2Printed microwave resonator for measuring high electron density plasmasAPPLIED MATERIALS INC·Filed 2023·Granted Nov 25, 2025·0 cites·22 claims
- 4474US2025079124A1High bandwidth architecture for centralized coherent control at the edge of processing toolAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4573US10666206B2Supervisory control of radio frequency (RF) impedance tuning operationMKS INSTR INC·Filed 2017·Granted May 26, 2020·2 cites·35 claims
- 4673US2025095965A1Fleetwide impedance tuning performance optimizationAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 4771US12301199B2Impedance tuning utility of vector space defined by transmission line quantitiesAPPLIED MATERIALS INC·Filed 2022·Granted May 13, 2025·0 cites·14 claims
- 4870US12165843B2Fleetwide impedance tuning performance optimizationAPPLIED MATERIALS INC·Filed 2022·Granted Dec 10, 2024·0 cites·19 claims
- 4970US12061215B2RF measurement from a transmission line sensorAPPLIED MATERIALS INC·Filed 2022·Granted Aug 13, 2024·0 cites·15 claims
- 5070US6627464B2Adaptive plasma characterization systemENI TECHNOLOGY INC·Filed 2001·Granted Sep 30, 2003·13 cites·15 claims
Showing the top 50 of 66 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →