Inventor · disambiguated record
Daniel Lee Diehl
Also filed as: DIEHL DANIEL LEE
26 granted patents·5 pending applications·65 citations·filing 2013–2023
94Inventor score
Files withAPPLIED MATERIALS INC31
Top patents by PatentIndex Score
31 records- 0194US11550222B2Dose reduction of patterned metal oxide photoresistsAPPLIED MATERIALS INC·Filed 2020·Granted Jan 10, 2023·3 cites·20 claims
- 0293US11081623B2Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devicesAPPLIED MATERIALS INC·Filed 2019·Granted Aug 3, 2021·2 cites·8 claims
- 0391US9478421B2Optically tuned hardmask for multi-patterning applicationsAPPLIED MATERIALS INC·Filed 2015·Granted Oct 25, 2016·6 cites·13 claims
- 0490US10236412B2Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devicesAPPLIED MATERIALS INC·Filed 2018·Granted Mar 19, 2019·3 cites·11 claims
- 0589US9177796B2Optically tuned hardmask for multi-patterning applicationsAPPLIED MATERIALS INC·Filed 2014·Granted Nov 3, 2015·7 cites·12 claims
- 0688US10886155B2Optical stack deposition and on-board metrologyAPPLIED MATERIALS INC·Filed 2019·Granted Jan 5, 2021·7 cites·20 claims
- 0785US11495461B2Film stack for lithography applicationsAPPLIED MATERIALS INC·Filed 2020·Granted Nov 8, 2022·2 cites·20 claims
- 0885US11437559B2Method and apparatus for deposition of multilayer device with superconductive filmAPPLIED MATERIALS INC·Filed 2020·Granted Sep 6, 2022·1 cites·13 claims
- 0983US10546973B2Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devicesAPPLIED MATERIALS INC·Filed 2019·Granted Jan 28, 2020·1 cites·14 claims
- 1080USD904640SSubstrate carrierAPPLIED MATERIALS INC·Filed 2019·Granted Dec 8, 2020·20 cites·1 claims
- 1180US2024003000A1Method and Apparatus for Deposition of Mental NitridesAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1278US11575071B2Oxygen controlled PVD ALN buffer for GAN-based optoelectronic and electronic devicesAPPLIED MATERIALS INC·Filed 2021·Granted Feb 7, 2023·0 cites·15 claims
- 1378US10096725B2Method for graded anti-reflective coatings by physical vapor depositionAPPLIED MATERIALS INC·Filed 2014·Granted Oct 9, 2018·1 cites·14 claims
- 1477US9746678B2Light wave separation lattices and methods of forming light wave separation latticesAPPLIED MATERIALS INC·Filed 2014·Granted Aug 29, 2017·1 cites·13 claims
- 1576US9633839B2Methods for depositing dielectric films via physical vapor deposition processesAPPLIED MATERIALS INC·Filed 2015·Granted Apr 25, 2017·2 cites·19 claims
- 1676US9337051B2Method for critical dimension reduction using conformal carbon filmsAPPLIED MATERIALS INC·Filed 2015·Granted May 10, 2016·2 cites·19 claims
- 1775US11994800B2Dose reduction of patterned metal oxide photoresistsAPPLIED MATERIALS INC·Filed 2022·Granted May 28, 2024·0 cites·20 claims
- 1875US11778926B2Method and apparatus for deposition of multilayer device with superconductive filmAPPLIED MATERIALS INC·Filed 2022·Granted Oct 3, 2023·0 cites·19 claims
- 1975US10109481B2Aluminum-nitride buffer and active layers by physical vapor depositionAPPLIED MATERIALS INC·Filed 2013·Granted Oct 23, 2018·3 cites·16 claims
- 2074US9478697B2Reusable substrate carrierAPPLIED MATERIALS INC·Filed 2014·Granted Oct 25, 2016·3 cites·15 claims
- 2171US9929310B2Oxygen controlled PVD aluminum nitride buffer for gallium nitride-based optoelectronic and electronic devicesAPPLIED MATERIALS INC·Filed 2013·Granted Mar 27, 2018·1 cites·20 claims
- 2269US11739418B2Method and apparatus for deposition of metal nitridesAPPLIED MATERIALS INC·Filed 2020·Granted Aug 29, 2023·0 cites·19 claims
- 2364US11056277B2Magnetized substrate carrier apparatus with shadow mask for depositionAPPLIED MATERIALS INC·Filed 2019·Granted Jul 6, 2021·0 cites·20 claims
- 2462US2018011331A1Light wave separation lattices and methods of forming light wave separation latticesAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 2559US10193014B2Oxygen controlled PVD AlN buffer for GaN-based optoelectronic and electronic devicesAPPLIED MATERIALS INC·Filed 2015·Granted Jan 29, 2019·0 cites·7 claims
- 2657US11313034B2Methods for depositing amorphous silicon layers or silicon oxycarbide layers via physical vapor depositionAPPLIED MATERIALS INC·Filed 2017·Granted Apr 26, 2022·0 cites·11 claims
- 2757US2019051768A1Method for graded anti-reflective coatings by physical vapor depositionAPPLIED MATERIALS INC·Filed 2018·Application pending·0 cites
- 2854US11802349B2Method for depositing high quality PVD filmsAPPLIED MATERIALS INC·Filed 2020·Granted Oct 31, 2023·0 cites·11 claims
- 2953US2019212656A1PVD Films For EUV LithographyAPPLIED MATERIALS INC·Filed 2019·Application pending·0 cites
- 3051US2018135183A1Surface Treatment For EUV LithographyAPPLIED MATERIALS INC·Filed 2017·Application pending·0 cites
- 3147US12125728B2Substrate carrierAPPLIED MATERIALS INC·Filed 2020·Granted Oct 22, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →