Inventor · disambiguated record
Darrell Ehrlich
Also filed as: EHRLICH DARRELL
15 granted patents·12 pending applications·22 citations·filing 2012–2025
88Inventor score
Top patents by PatentIndex Score
27 records- 0197US11594400B2Multi zone gas injection upper electrode systemLAM RES CORP·Filed 2020·Granted Feb 28, 2023·6 cites·11 claims
- 0287US11967517B2Electrostatic chuck with ceramic monolithic bodyLAM RES CORP·Filed 2020·Granted Apr 23, 2024·2 cites·18 claims
- 0381US9058960B2Compression member for use in showerhead electrode assemblyEHRLICH DARRELL·Filed 2012·Granted Jun 16, 2015·6 cites·16 claims
- 0479US11798789B2Replaceable and/or collapsible edge ring assemblies for plasma sheath tuning incorporating edge ring positioning and centering featuresLAM RES CORP·Filed 2018·Granted Oct 24, 2023·3 cites·41 claims
- 0577US2025364298A1Coolant channel with internal fins for substrate processing pedestalsLAM RES CORP·Filed 2025·Application pending·0 cites
- 0676US2025316459A1Electrostatic edge ring mounting system for substrate processingLAM RES CORP·Filed 2025·Application pending·0 cites
- 0775US12500068B2Edge rings providing kinematic coupling and corresponding substrate processing systemsLAM RES CORP·Filed 2023·Granted Dec 16, 2025·0 cites·51 claims
- 0873US12131890B2Chuck for plasma processing chamberLAM RES CORP·Filed 2020·Granted Oct 29, 2024·1 cites·13 claims
- 0971US2024404798A1High power electrostatic chuck with features preventing he hole light-up/arcingLAM RES CORP·Filed 2024·Application pending·0 cites
- 1068US9922804B2Compression member for use in showerhead electrode assemblyLAM RES CORP·Filed 2015·Granted Mar 20, 2018·1 cites·18 claims
- 1165US12340989B2Electrostatic edge ring mounting system for substrate processingLAM RES CORP·Filed 2021·Granted Jun 24, 2025·0 cites·25 claims
- 1263US10622195B2Multi zone gas injection upper electrode systemBISE RYAN·Filed 2012·Granted Apr 14, 2020·2 cites·11 claims
- 1362US10186437B2Substrate holder having integrated temperature measurement electrical devicesLAM RES CORP·Filed 2015·Granted Jan 22, 2019·1 cites·25 claims
- 1462US2022270863A1Moveable edge rings with reduced capacitance variation for substrate processing systemsLAM RES CORP·Filed 2022·Application pending·0 cites
- 1559US12381105B2Coolant channel with internal fins for substrate processing pedestalsLAM RES CORP·Filed 2021·Granted Aug 5, 2025·0 cites·29 claims
- 1659US10332729B2Compression member for use in showerhead electrode assemblyLAM RES CORP·Filed 2018·Granted Jun 25, 2019·0 cites·18 claims
- 1754US2022254612A1Moveable edge rings with reduced capacitance variation for substrate processing systemsLAM RES CORP·Filed 2020·Application pending·0 cites
- 1853US10978323B2Substrate holder having integrated temperature measurement electrical devicesLAM RES CORP·Filed 2019·Granted Apr 13, 2021·0 cites·20 claims
- 1952US2022223387A1High power electrostatic chuck with features preventing he hole light-up/arcingLAM RES CORP·Filed 2019·Application pending·0 cites
- 2048US10667379B2Connections between laminated heater and heater voltage inputsLAM RES CORP·Filed 2017·Granted May 26, 2020·0 cites·13 claims
- 2147US2023274954A1Substrate supports with multilayer structure including coupled heater zones with local thermal controlLAM RES CORP·Filed 2021·Application pending·0 cites
- 2243US2022246404A1Sealant coating for plasma processing chamber componentsLAM RES CORP·Filed 2020·Application pending·0 cites
- 2342US10764966B2Laminated heater with different heater trace materialsLAM RES CORP·Filed 2017·Granted Sep 1, 2020·0 cites·14 claims
- 2442US2023343627A1Anodization for metal matrix composite semiconductor processing chamber componentsLAM RES CORP·Filed 2021·Application pending·0 cites
- 2540US2023081544A1Component with protective surface for processing chamberLAM RES CORP·Filed 2021·Application pending·0 cites
- 2638US2023039670A1Mixed metal baseplates for improved thermal expansion matching with thermal oxide spraycoatLAM RES CORP·Filed 2021·Application pending·0 cites
- 2733US2019187003A1Corrosion-Resistant Temperature Sensor ProbeLAM RES CORP·Filed 2017·Application pending·0 cites
Join the waitlist — get patent alerts
Get an alert when Darrell Ehrlich files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →