Inventor · disambiguated record
Daniel Golde
Also filed as: GOLDE DANIEL
5 granted patents·4 citations·filing 2017–2022
64Inventor score
Files withZEISS CARL SMT GMBH5
Top patents by PatentIndex Score
5 records- 0190US10048592B2Projection lens, projection exposure apparatus and projection exposure method for EUV microlithographyZEISS CARL SMT GMBH·Filed 2017·Granted Aug 14, 2018·4 cites·22 claims
- 0264US12210289B2Mirror, in particular for a microlithographic projection exposure apparatusZEISS CARL SMT GMBH·Filed 2022·Granted Jan 28, 2025·0 cites·22 claims
- 0360US10591825B2Projection lens, projection exposure apparatus and projection exposure method for EUV microlithographyZEISS CARL SMT GMBH·Filed 2018·Granted Mar 17, 2020·0 cites·30 claims
- 0458US12222655B2Stop, optical system and lithography apparatusZEISS CARL SMT GMBH·Filed 2021·Granted Feb 11, 2025·0 cites·20 claims
- 0540US9933710B2Projection exposure method and projection exposure apparatusZEISS CARL SMT GMBH·Filed 2017·Granted Apr 3, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →