Inventor · disambiguated record
Daiki Hariu
Also filed as: HARIU DAIKI
0 granted patents·4 pending applications·0 citations·filing 2022–2024
Files withTOKYO ELECTRON LTD4
Top patents by PatentIndex Score
4 records- 0151US2023268216A1Substrate support and plasma processing apparatusTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0250US2024266154A1Plasma processing apparatus and substrate support bodyTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0347US2023187184A1Plasma processing apparatus and potential control methodTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
- 0444US2023087660A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →