Inventor · disambiguated record
David V. Horak
Also filed as: HORAK DAVID V · HORAK DAVID VACLAY · HORÁK DAVID
12 granted patents·7 pending applications·148 citations·filing 1991–2021
91Inventor score
Top patents by PatentIndex Score
19 records- 0197US8038834B2Method and system for controlling radical distributionTOKYO ELECTRON LTD·Filed 2010·Granted Oct 18, 2011·18 cites·15 claims
- 0294US7718030B2Method and system for controlling radical distributionTOKYO ELECTRON LTD·Filed 2005·Granted May 18, 2010·20 cites·17 claims
- 0384US7585614B2Sub-lithographic imaging techniques and processesIBM·Filed 2004·Granted Sep 8, 2009·28 cites·20 claims
- 0474US6342323B1Alignment methodology for lithographyIBM·Filed 2000·Granted Jan 29, 2002·12 cites·20 claims
- 0566US2022092700A1Evaluation response system and methodBRIZA INC·Filed 2021·Application pending·0 cites
- 0666US2022092489A1Evaluation response system and methodBRIZA INC·Filed 2021·Application pending·0 cites
- 0766US2022092690A1Evaluation response system and methodBRIZA INC·Filed 2021·Application pending·0 cites
- 0866US2022092689A1Evaluation response system and methodBRIZA INC·Filed 2021·Application pending·0 cites
- 0966US2022092653A1Evaluation response system and methodBRIZA INC·Filed 2021·Application pending·0 cites
- 1066US2022092089A1Evaluation response system and methodBRIZA INC·Filed 2021·Application pending·0 cites
- 1165US7289864B2Feature dimension deviation correction system, method and program productTOKYO ELECTRON LTD·Filed 2004·Granted Oct 30, 2007·8 cites·30 claims
- 1264US6268908B1Micro adjustable illumination apertureIBM·Filed 1999·Granted Jul 31, 2001·22 cites·15 claims
- 1363US6014422AMethod for varying x-ray hybrid resist space dimensionsINTERNAITONAL BUSINESS MACHINE·Filed 1998·Granted Jan 11, 2000·21 cites·17 claims
- 1461US6338921B1Mask with linewidth compensation and method of making sameIBM·Filed 2000·Granted Jan 15, 2002·6 cites·52 claims
- 1557US7027125B2System and apparatus for photolithographyIBM·Filed 2004·Granted Apr 11, 2006·4 cites·20 claims
- 1653US7502660B2Feature dimension deviation correction system, method and program productIBM·Filed 2007·Granted Mar 10, 2009·0 cites·27 claims
- 1740US2006096951A1Apparatus and method for controlling process non-uniformityTOKYO ELECTRON LTD·Filed 2004·Application pending·0 cites
- 1838US6387596B2Method of forming resist images by periodic pattern removalIBM·Filed 1999·Granted May 14, 2002·5 cites·20 claims
- 1930US5173452AProcess for the vapor deposition of polysilanes photoresistsDOBUZINSKY DAVID M·Filed 1991·Granted Dec 22, 1992·4 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →