Inventor · disambiguated record

David Alan Metz

Also filed as: METZ DAVID ALAN

2 granted patents·7 citations·filing 2018–2021

50Inventor score

Technology areasH10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0189US10991550B2Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station systemLAM RES CORP·Filed 2018·Granted Apr 27, 2021·7 cites·7 claims
0265US11594397B2Modular recipe controlled calibration (MRCC) apparatus used to balance plasma in multiple station systemLAM RES CORP·Filed 2021·Granted Feb 28, 2023·0 cites·13 claims

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