Inventor · disambiguated record
Daniel Runde
Also filed as: RUNDE DANIEL
8 granted patents·13 citations·filing 2012–2021
78Inventor score
Top patents by PatentIndex Score
8 records- 0188US9671548B2Optical waveguide for guiding illumination lightZEISS CARL SMT GMBH·Filed 2015·Granted Jun 6, 2017·8 cites·20 claims
- 0287US10514608B2Method for producing an illumination system for an EUV projection exposure system, and illumination systemZEISS CARL SMT GMBH·Filed 2018·Granted Dec 24, 2019·4 cites·25 claims
- 0368US10209620B2Illumination system for EUV projection exposure apparatus, EUV projection exposure apparatus including illumination system and method for operating an EUV projection exposure apparatusZEISS CARL SMT GMBH·Filed 2018·Granted Feb 19, 2019·1 cites·20 claims
- 0461US11500294B2Method for replacing a mirror in a projection exposure apparatus, and position- and orientation data measuring device for carrying out the methodZEISS CARL SMT GMBH·Filed 2021·Granted Nov 15, 2022·0 cites·14 claims
- 0559US11048172B2Method for producing an illumination system for an EUV projection exposure system, and illumination systemZEISS CARL SMT GMBH·Filed 2019·Granted Jun 29, 2021·0 cites·22 claims
- 0652US10254466B2Optical waveguide for guiding illumination lightZEISS CARL SMT GMBH·Filed 2017·Granted Apr 9, 2019·0 cites·32 claims
- 0744US9841685B2Determination of a corrected variableZEISS CARL SMT GMBH·Filed 2016·Granted Dec 12, 2017·0 cites·19 claims
- 0829US9025131B2Optical beam deflecting element, illumination system including same, and related methodRUNDE DANIEL·Filed 2012·Granted May 5, 2015·0 cites·24 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →