Inventor · disambiguated record
Daiki Shibata
Also filed as: SHIBATA DAIKI
5 granted patents·2 pending applications·12 citations·filing 2014–2023
71Inventor score
Top patents by PatentIndex Score
7 records- 0195US11561473B2Liquid treatment apparatus and method of adjusting temperature of treatment liquidTOKYO ELECTRON LTD·Filed 2020·Granted Jan 24, 2023·6 cites·12 claims
- 0276US10036379B2Processing liquid supplying apparatus, processing liquid supplying method and storage mediumTOKYO ELECTRON LTD·Filed 2014·Granted Jul 31, 2018·4 cites·14 claims
- 0375US12261064B2Tank, substrate processing apparatus, and method of using the tankTOKYO ELECTRON LTD·Filed 2020·Granted Mar 25, 2025·1 cites·11 claims
- 0469US11860542B2Liquid treatment apparatus and method of adjusting temperature of treatment liquidTOKYO ELECTRON LTD·Filed 2023·Granted Jan 2, 2024·0 cites·14 claims
- 0562US10400760B2Liquid delivery method, liquid delivery system, and computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2015·Granted Sep 3, 2019·1 cites·9 claims
- 0660US2025101565A1Vacuum carburizing furnace and vacuum carburizing treatment methodDOWA THERMOTECH CO LTD·Filed 2023·Application pending·0 cites
- 0743US2021078035A1Coating method, coating apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2020·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →