Inventor · disambiguated record
Daniel Gene Smith
Also filed as: SMITH DANIEL G · SMITH DANIEL GENE
50 granted patents·32 pending applications·158 citations·filing 2006–2024
97Inventor score
Top patents by PatentIndex Score
82 records- 0197US9638799B2Scan mirrors for laser radarNIKON CORP·Filed 2013·Granted May 2, 2017·74 cites·43 claims
- 0292US8829420B2Two dimensional encoder system and methodGOODWIN ERIC PETER·Filed 2011·Granted Sep 9, 2014·10 cites·20 claims
- 0386US10139492B2Radar systems with dual fiber coupled lasersNIKON CORP·Filed 2017·Granted Nov 27, 2018·5 cites·12 claims
- 0485US7982884B2Autofocus system with error compensationNIKON CORP·Filed 2008·Granted Jul 19, 2011·7 cites·15 claims
- 0584US11934105B2Optical objective for operation in EUV spectral regionNIKON CORP·Filed 2019·Granted Mar 19, 2024·2 cites·44 claims
- 0684US11061338B2High-resolution position encoder with image sensor and encoded target patternNIKON CORP·Filed 2018·Granted Jul 13, 2021·3 cites·44 claims
- 0784US9618619B2Radar systems with dual fiber coupled lasersNIKON CORP·Filed 2013·Granted Apr 11, 2017·8 cites·23 claims
- 0883US10794689B2Autofocus system and methodNIKON CORP·Filed 2018·Granted Oct 6, 2020·2 cites·20 claims
- 0982US9587977B2Boresight error monitor for laser radar integrated optical assemblyNIKON CORP·Filed 2013·Granted Mar 7, 2017·8 cites·45 claims
- 1082US8724095B2Optical assembly for laser radarGOODWIN ERIC PETER·Filed 2011·Granted May 13, 2014·9 cites·26 claims
- 1180US10837763B2Optical assembly, method for producing data in the same, and method for manufacturing structureNIKON CORP·Filed 2017·Granted Nov 17, 2020·2 cites·23 claims
- 1280US10747117B2Extreme ultraviolet lithography system that utilizes pattern stitchingNIKON CORP·Filed 2019·Granted Aug 18, 2020·1 cites·20 claims
- 1378US11982521B2Measurement of a change in a geometrical characteristic and/or position of a workpieceNIKON CORP·Filed 2018·Granted May 14, 2024·2 cites·24 claims
- 1478US9625368B2Apparatus, optical assembly, method for inspection or measurement of an object and method for manufacturing a structureGOODWIN ERIC PETER·Filed 2011·Granted Apr 18, 2017·5 cites·27 claims
- 1577US10890849B2EUV lithography system for dense line patterningNIKON CORP·Filed 2017·Granted Jan 12, 2021·1 cites·18 claims
- 1677US10295911B2Extreme ultraviolet lithography system that utilizes pattern stitchingNIKON CORP·Filed 2017·Granted May 21, 2019·1 cites·31 claims
- 1776US11099483B2Euv lithography system for dense line patterningNIKON CORP·Filed 2017·Granted Aug 24, 2021·1 cites·29 claims
- 1876US2025130037A1Metrology for additive manufacturingNIKON CORP·Filed 2024·Application pending·0 cites
- 1973US12104891B1Spatially filtered talbot interferometer for wafer distortion measurementNIKON CORP·Filed 2020·Granted Oct 1, 2024·1 cites·33 claims
- 2072US9091941B2Fast illumination simulator based on a calibrated flexible point-spread functionNIKON CORP·Filed 2014·Granted Jul 28, 2015·1 cites·20 claims
- 2171US11578969B2Optical assembly, method for producing data in the same, and method for manufacturing structureNIKON CORP·Filed 2020·Granted Feb 14, 2023·0 cites·11 claims
- 2271US11300884B2Illumination system with curved 1d-patterned mask for use in EUV-exposure toolNIKON CORP·Filed 2019·Granted Apr 12, 2022·1 cites·46 claims
- 2371US8842296B2Methods and devices for reducing errors in Goos-Hänchen corrections of displacement dataNIKON CORP·Filed 2013·Granted Sep 23, 2014·1 cites·32 claims
- 2469US9243901B2Rules for reducing the sensitivity of fringe projection autofocus to air temperature changesNIKON CORP·Filed 2013·Granted Jan 26, 2016·1 cites·44 claims
- 2567US8582119B2Large scale metrology apparatus and methodNOVAK W THOMAS·Filed 2011·Granted Nov 12, 2013·3 cites·31 claims
- 2666US9977343B2Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirrorNIKON CORP·Filed 2014·Granted May 22, 2018·1 cites·11 claims
- 2766US9360347B2Two-dimensional encoder system and methodNIKON CORP·Filed 2014·Granted Jun 7, 2016·1 cites·25 claims
- 2865US12346029B2Curved reticle by mechanical and phase bending along orthogonal axesNIKON CORP·Filed 2022·Granted Jul 1, 2025·0 cites·34 claims
- 2965US2025334792A1Optical wedge in fmcw lidar optics systemAEVA INC·Filed 2024·Application pending·0 cites
- 3063US9097851B2System and method for compensating instability in an autofocus systemNIKON CORP·Filed 2014·Granted Aug 4, 2015·1 cites·24 claims
- 3163US9074911B2Measurement system and method utilizing high contrast encoder head for measuring relative movement between objectsGOODWIN ERIC PETER·Filed 2012·Granted Jul 7, 2015·1 cites·25 claims
- 3262US12203745B2Metrology for additive manufacturingNIKON CORP·Filed 2020·Granted Jan 21, 2025·0 cites·39 claims
- 3361US9030668B2Method for spatially multiplexing two or more fringe projection signals on a single detectorNIKON CORP·Filed 2013·Granted May 12, 2015·1 cites·42 claims
- 3461US2024367257A1Methods for large-scale optical manufacturingNIKON CORP·Filed 2022·Application pending·0 cites
- 3561US2018031368A1Autofocus system and methodNIPPON KOGAKU KK·Filed 2017·Application pending·0 cites
- 3660US9335159B2Methods and devices for reducing errors in Goos-Hänchen corrections of displacement dataNIKON CORP·Filed 2014·Granted May 10, 2016·0 cites·29 claims
- 3760US8736813B2Exposure apparatus with an illumination system generating multiple illumination beamsSMITH DANIEL GENE·Filed 2009·Granted May 27, 2014·1 cites·20 claims
- 3859US10928187B2Compensation for Goos-Hanchen error in autofocus systemsNIKON CORP·Filed 2017·Granted Feb 23, 2021·0 cites·19 claims
- 3959US10197668B2Eighth wave corner cube retarder for laser radarNIKON CORP·Filed 2014·Granted Feb 5, 2019·1 cites·36 claims
- 4059US10180496B2Laser radar with remote local oscillatorNIKON CORP·Filed 2013·Granted Jan 15, 2019·1 cites·41 claims
- 4157US10719017B2Correction of errors caused by ambient non-uniformities in a fringe-projection autofocus system in absence of a reference mirrorNIKON CORP·Filed 2018·Granted Jul 21, 2020·0 cites·12 claims
- 4257US10690317B2Illumination device for optimizing polarization in an illumination pupilNIKON CORP·Filed 2017·Granted Jun 23, 2020·0 cites·19 claims
- 4357US9732934B2Illumination device for optimizing polarization in an illumination pupilNIKON CORP·Filed 2012·Granted Aug 15, 2017·0 cites·31 claims
- 4457US2022293390A1E-beam position trackerNIKON CORP·Filed 2022·Application pending·0 cites
- 4556US11054745B2Illumination system with flat 1D-patterned mask for use in EUV-exposure toolNIKON CORP·Filed 2019·Granted Jul 6, 2021·0 cites·18 claims
- 4656US9816805B2Compensation for Goos-Hanchen error in autofocus systemsNIKON CORP·Filed 2014·Granted Nov 14, 2017·0 cites·22 claims
- 4755US9810530B2Autofocus system and methodNIKON CORP·Filed 2015·Granted Nov 7, 2017·0 cites·28 claims
- 4855US7612892B2Imaging optical system configured with through the lens optics for producing control informationNIKON CORP·Filed 2006·Granted Nov 3, 2009·1 cites·36 claims
- 4955US2022082697A1Laser radarNIKON METROLOGY NV·Filed 2021·Application pending·0 cites
- 5054US2014340691A1Enhancements to integrated optical assemblyNIKON CORP·Filed 2012·Application pending·0 cites
Showing the top 50 of 82 patent records by PatentIndex Score.
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →