Inventor · disambiguated record
Da Song
Also filed as: SONG DA · SONG DA SOM
3 granted patents·9 pending applications·0 citations·filing 2022–2025
42Inventor score
Top patents by PatentIndex Score
12 records- 0175US2025283760A1Optical emission spectroscopy for advanced process characterizationTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0274US12306044B2Optical emission spectroscopy for advanced process characterizationTOKYO ELECTRON LTD·Filed 2022·Granted May 20, 2025·0 cites·20 claims
- 0373US2024418501A1Optical sensor for film thickness measurementTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0463US12158374B2Time-resolved OES data collectionTOKYO ELECTRON LTD·Filed 2022·Granted Dec 3, 2024·0 cites·20 claims
- 0561US2025197434A1Novel multi-component organometallic compound, composition containing same for solution process, and method for manufacturing thin film using sameKOREA RES INST CHEMICAL TECH·Filed 2023·Application pending·0 cites
- 0658US2025293012A1System and method for semiconductor processingTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0756US12362158B2Method for OES data collection and endpoint detectionTOKYO ELECTRON LTD·Filed 2022·Granted Jul 15, 2025·0 cites·20 claims
- 0855US2025283814A1Method for optical emission spectroscopy (oes) detector signal sensitivity improvementTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0954US2025112065A1Metrology integrated with vacuum processingTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1054US2024339309A1Advanced OES CharacterizationTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1153US2025138429A1Endpoint detection in dry development of photoresistTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 1247US2025197433A1Novel organoplatinum compound, method for manufacturing same, method for manufacturing thin film using same, and method for manufacturing high-performance optical sensor for detecting mid-infrared rays using sameKOREA RES INST CHEMICAL TECH·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →