Inventor · disambiguated record

Daniel P. Spence

Also filed as: SPENCE DANIEL P

33 granted patents·15 pending applications·84 citations·filing 2007–2023

95Inventor score

Technology areasH10P C23C C07F C07C B05D

Files withAIR PROD & CHEM18 VERSUM MAT US LLC18 LEI XINJIAN6 IVANOV SERGEI VLADIMIROVICH3 NORMAN JOHN ANTHONY THOMAS2

Top patents by PatentIndex Score

48 records

0195US9337018B2Methods for depositing films with organoaminodisilane precursorsAIR PROD & CHEM·Filed 2013·Granted May 10, 2016·15 cites·45 claims
0294US10421766B2Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing filmsAIR PROD & CHEM·Filed 2016·Granted Sep 24, 2019·5 cites·13 claims
0393US10899500B2Alkoxysilylamine compounds and applications thereofVERSUM MAT US LLC·Filed 2019·Granted Jan 26, 2021·5 cites·12 claims
0493US9200167B2Alkoxyaminosilane compounds and applications thereofAIR PROD & CHEM·Filed 2013·Granted Dec 1, 2015·10 cites·16 claims
0592US7723493B2Metal complexes of tridentate BETA -ketoiminatesAIR PROD & CHEM·Filed 2008·Granted May 25, 2010·12 cites·24 claims
0690US7691984B2Metal complexes of tridentate β-ketoiminatesAIR PROD & CHEM·Filed 2007·Granted Apr 6, 2010·10 cites·21 claims
0787US8617305B2Metal complexes for metal-containing film depositionLEI XINJIAN·Filed 2012·Granted Dec 31, 2013·6 cites·15 claims
0886US8471049B2Precursors for depositing group 4 metal-containing filmsLEI XINJIAN·Filed 2009·Granted Jun 25, 2013·8 cites·18 claims
0985US9796739B2AZA-polysilane precursors and methods for depositing films comprising sameAIR PROD & CHEM·Filed 2014·Granted Oct 24, 2017·6 cites·21 claims
1078US2023167549A1Organoamino-polisiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2023·Application pending·0 cites
1174US9613799B2Methods for depositing films with organoaminodisilane precursorsAIR PROD & CHEM·Filed 2016·Granted Apr 4, 2017·1 cites·14 claims
1273US8680289B2Complexes of imidazole ligandsNORMAN JOHN ANTHONY THOMAS·Filed 2012·Granted Mar 25, 2014·1 cites·32 claims
1373US8642797B2Amidate precursors for depositing metal containing filmsIVANOV SERGEI VLADIMIROVICH·Filed 2011·Granted Feb 4, 2014·1 cites·27 claims
1472US11142658B2Bisaminoalkoxysilane compounds and methods for using same to deposit silicon-containing filmsVERSUM MAT US LLC·Filed 2019·Granted Oct 12, 2021·0 cites·5 claims
1569US11735413B2Precursors and flowable CVD methods for making low-k films to fill surface featuresVERSUM MAT US LLC·Filed 2017·Granted Aug 22, 2023·1 cites·24 claims
1668US11591692B2Organoamino-polysiloxanes for deposition of silicon-containing filmsVERSUM MAT US LLC·Filed 2018·Granted Feb 28, 2023·0 cites·6 claims
1768US10279959B2Alkoxysilylamine compounds and applications thereofAIR PROD & CHEM·Filed 2013·Granted May 7, 2019·0 cites·2 claims
1866US9978585B2Organoaminodisilane precursors and methods for depositing films comprising sameAIR PROD & CHEM·Filed 2013·Granted May 22, 2018·1 cites·17 claims
1965US12441747B2Silicon compounds and methods for depositing films using sameVERSUM MAT US LLC·Filed 2022·Granted Oct 14, 2025·0 cites·2 claims
2064US10283350B2Methods for depositing films with organoaminodisilane precursorsVERSUM MAT US LLC·Filed 2018·Granted May 7, 2019·0 cites·14 claims
2164US10170297B2Compositions and methods using same for flowable oxide depositionAIR PROD & CHEM·Filed 2014·Granted Jan 1, 2019·1 cites·3 claims
2263US9997350B2Methods for depositing films with organoaminodisilane precursorsVERSUM MAT US LLC·Filed 2017·Granted Jun 12, 2018·0 cites·16 claims
2363US2020048286A1Silicon compounds and methods for depositing films using sameVERSUM MAT US LLC·Filed 2019·Application pending·0 cites
2457US2010119726A1Group 2 Metal Precursors For Deposition Of Group 2 Metal Oxide FilmsAIR PROD & CHEM·Filed 2008·Application pending·0 cites
2556US7919409B2Materials for adhesion enhancement of copper film on diffusion barriersAIR PROD & CHEM·Filed 2008·Granted Apr 5, 2011·1 cites·11 claims
2656US2022388033A1Precursors for depositing films with high elastic modulusVERSUM MAT US LLC·Filed 2022·Application pending·0 cites
2755US2023058258A1Method for depositing a filmVERSUM MAT US LLC·Filed 2020·Application pending·0 cites
2854US9018387B2Complexes of imidazole ligandsNORMAN JOHN ANTHONY THOMAS·Filed 2011·Granted Apr 28, 2015·0 cites·34 claims
2954US2013243968A1Catalyst synthesis for organosilane sol-gel reactionsAIR PROD & CHEM·Filed 2013·Application pending·0 cites
3054US2008254218A1Metal Precursor Solutions For Chemical Vapor DepositionAIR PROD & CHEM·Filed 2008·Application pending·0 cites
3153US8592606B2Liquid precursor for depositing group 4 metal containing filmsLEI XINJIAN·Filed 2010·Granted Nov 26, 2013·0 cites·17 claims
3253US2008286464A1Group 2 Metal Precursors For Depositing Multi-Component Metal Oxide FilmsAIR PROD & CHEM·Filed 2008·Application pending·0 cites
3352US2024240309A1New Precursors For Depositing Films With High Elastic ModulusVERSUM MAT US LLC·Filed 2022·Application pending·0 cites
3450US2023386825A1Alkoxydisiloxanes and dense organosilica films made therefromVERSUM MAT US LLC·Filed 2021·Application pending·0 cites
3550US2023279030A1Cyclosiloxanes and films made therewithVERSUM MAT US LLC·Filed 2021·Application pending·0 cites
3648US2023103933A1New precursors for depositing films with elastic modulusVERSUM MAT US LLC·Filed 2021·Application pending·0 cites
3748US2011256314A1Methods for deposition of group 4 metal containing filmsAIR PROD & CHEM·Filed 2010·Application pending·0 cites
3847US11043374B2Silacycloalkane compounds and methods for depositing silicon containing films using sameVERSUM MAT US LLC·Filed 2019·Granted Jun 22, 2021·0 cites·23 claims
3946US8507704B2Liquid composition containing aminoether for deposition of metal-containing filmsIVANOV SERGEI VLADIMIROVICH·Filed 2010·Granted Aug 13, 2013·0 cites·14 claims
4046US2022301862A1Monoalkoxysilanes and dense organosilica films made therefromVERSUM MAT US LLC·Filed 2020·Application pending·0 cites
4146US2024052490A1Monoalkoxysilanes and dialkoxysilanes and dense organosilica films made therefromVERSUM MAT US LLC·Filed 2020·Application pending·0 cites
4245US9677178B2Alkoxyaminosilane compounds and applications thereofAIR PROD & CHEM·Filed 2015·Granted Jun 13, 2017·0 cites·10 claims
4345US8247617B2Group 2 metal precursors for depositing multi-component metal oxide filmsLEI XINJIAN·Filed 2008·Granted Aug 21, 2012·0 cites·16 claims
4445US8092870B2Preparation of metal oxide thin film via cyclic CVD or ALDKIM MOO-SUNG·Filed 2009·Granted Jan 10, 2012·0 cites·31 claims
4544US8952188B2Group 4 metal precursors for metal-containing filmsIVANOV SERGEI VLADIMIROVICH·Filed 2010·Granted Feb 10, 2015·0 cites·13 claims
4642US9809711B2Catalyst and formulations comprising same for alkoxysilanes hydrolysis reaction in semiconductor processAIR PROD & CHEM·Filed 2013·Granted Nov 7, 2017·0 cites·26 claims
4742US9079923B2Multidentate ketoimine ligands for metal complexesLEI XINJIAN·Filed 2011·Granted Jul 14, 2015·0 cites·14 claims
4839US8722933B2Method for preparing metal complexes of polydentate beta-ketoiminatesLEI XINJIAN·Filed 2010·Granted May 13, 2014·0 cites·17 claims

Join the waitlist — get patent alerts

Get an alert when Daniel P. Spence files or is granted a new patent.

We store only your email — no account needed. See our privacy policy.

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →