Inventor · disambiguated record
David Sporleder
Also filed as: SPORLEDER DAVID · SPORLEDER DAVID P
10 granted patents·3 pending applications·11 citations·filing 2012–2025
81Inventor score
Files withAXCELIS TECH INC7VARIAN SEMICONDUCTOR EQUIPMENT ASS INC3PEREL ALEXANDER S1SINHA ASHWINI K1VARIAN SEMICONDUCTOR EQUIPMENT1
Top patents by PatentIndex Score
13 records- 0188US9824846B2Dual material repellerVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Nov 21, 2017·5 cites·21 claims
- 0284US10347457B1Dynamic temperature control of an ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2017·Granted Jul 9, 2019·3 cites·20 claims
- 0379US12497687B2Ion implantation system and method for implanting aluminum using non-fluorine-containing halide species or moleculesAXCELIS TECH INC·Filed 2023·Granted Dec 16, 2025·0 cites·16 claims
- 0478US12154763B2Hydraulic feed system for an ion sourceAXCELIS TECH INC·Filed 2023·Granted Nov 26, 2024·0 cites·19 claims
- 0571US11728140B1Hydraulic feed system for an ion sourceAXCELIS TECH INC·Filed 2022·Granted Aug 15, 2023·0 cites·20 claims
- 0665US9187832B2Extended lifetime ion sourceVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2013·Granted Nov 17, 2015·1 cites·19 claims
- 0764US8937003B2Technique for ion implanting a targetPEREL ALEXANDER S·Filed 2012·Granted Jan 20, 2015·2 cites·19 claims
- 0863US2025308841A1Dopant delivery system to ion source using induction heatingAXCELIS TECH INC·Filed 2025·Application pending·0 cites
- 0962US2025087451A1Dual cathode temperature-controlled multi-cathode ion sourceAXCELIS TECH INC·Filed 2024·Application pending·0 cites
- 1051US11545330B2Ion source with multiple bias electrodesAXCELIS TECH INC·Filed 2021·Granted Jan 3, 2023·0 cites·20 claims
- 1151US9928983B2Vaporizer for ion sourceVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Mar 27, 2018·0 cites·17 claims
- 1249US11756772B2System and method for extending a lifetime of an ion source for molecular carbon implantsAXCELIS TECH INC·Filed 2020·Granted Sep 12, 2023·0 cites·20 claims
- 1339US2013341761A1Methods for extending ion source life and improving ion source performance during carbon implantationSINHA ASHWINI K·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →