Inventor · disambiguated record
Daniel A. Tichenor
Also filed as: TICHENOR DANIEL A
8 granted patents·371 citations·filing 1982–2006
90Inventor score
Top patents by PatentIndex Score
8 records- 0194US6031598AExtreme ultraviolet lithography machineEUV LLC·Filed 1998·Granted Feb 29, 2000·148 cites·20 claims
- 0291US6815129B1Compensation of flare-induced CD changes EUVLEUV LLC·Filed 2000·Granted Nov 9, 2004·57 cites·32 claims
- 0391US6469827B1Diffraction spectral filter for use in extreme-UV lithography condenserEUV LLC·Filed 2000·Granted Oct 22, 2002·79 cites·54 claims
- 0481US4441816AOptical double-slit particle measuring systemUS ENERGY·Filed 1982·Granted Apr 10, 1984·39 cites·11 claims
- 0566US6229871B1Projection lithography with distortion compensation using reticle chuck contouringEUV LLC·Filed 1999·Granted May 8, 2001·25 cites·20 claims
- 0661US6642995B2Mask-to-wafer alignment systemEUV LLC·Filed 2001·Granted Nov 4, 2003·7 cites·34 claims
- 0760US7239443B2Condenser optic with sacrificial reflective surfaceEUV LLC·Filed 2006·Granted Jul 3, 2007·5 cites·16 claims
- 0856US7081992B2Condenser optic with sacrificial reflective surfaceEUV LLC·Filed 2004·Granted Jul 25, 2006·11 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →