Inventor · disambiguated record
Daniel Zschaebitz
Also filed as: ZSCHAEBITZ DANIEL
2 granted patents·2 citations·filing 2011–2017
37Inventor score
Top patents by PatentIndex Score
2 records- 0163US10481592B2Selecting manufacturing settings based on historical data from manufacturing toolsGLOBALFOUNDRIES INC·Filed 2017·Granted Nov 19, 2019·1 cites·14 claims
- 0246US8660681B2Method and system for excursion monitoring in optical lithography processes in micro device fabricationPOOCK ANDRE·Filed 2011·Granted Feb 25, 2014·1 cites·17 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →