Inventor · disambiguated record
Devi Koty
Also filed as: KOTY DEVI
3 granted patents·4 pending applications·6 citations·filing 2006–2024
56Inventor score
Top patents by PatentIndex Score
7 records- 0184US11258012B2Oxygen-free plasma etching for contact etching of resistive random access memoryTOKYO ELECTRON LTD·Filed 2019·Granted Feb 22, 2022·5 cites·20 claims
- 0283US11844290B2Plasma co-doping to reduce the forming voltage in resistive random access memory (ReRAM) devicesTOKYO ELECTRON LTD·Filed 2021·Granted Dec 12, 2023·1 cites·21 claims
- 0357US2025279281A1Halogen gas mixtures for through-substrate etchingTOKYO ELECTRON LTD·Filed 2024·Application pending·0 cites
- 0454US2025287608A1Pillar critical dimension reduction by isotropic plasma etching with high selectivity to silicon-containing antireflective coating and silicon nitrideIBM·Filed 2024·Application pending·0 cites
- 0552US2023329127A1Resistive memory device and method of formingTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0649US12057322B2Methods for etching metal films using plasma processingTOKYO ELECTRON LTD·Filed 2019·Granted Aug 6, 2024·0 cites·12 claims
- 0737US2008041716A1Methods for producing photomask blanks, cluster tool apparatus for producing photomask blanks and the resulting photomask blanks from such methods and apparatusSCHOTT LITHOTEC USA CORP·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →