Inventor · disambiguated record
Detlef Pabst
Also filed as: PABST DETLEF
3 granted patents·5 citations·filing 2009–2014
53Inventor score
Top patents by PatentIndex Score
3 records- 0169US8180471B2Tuning a process controller based on a dynamic sampling rateGOOD RICHARD P·Filed 2009·Granted May 15, 2012·5 cites·18 claims
- 0236US9632499B2Work-in-progress substrate processing methods and systems for use in the fabrication of integrated circuitsGLOBALFOUNDRIES INC·Filed 2014·Granted Apr 25, 2017·0 cites·10 claims
- 0334US9748088B2Method, storage medium and system for controlling the processing of lots of workpiecesGLOBALFOUNDRIES INC·Filed 2013·Granted Aug 29, 2017·0 cites·25 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →